Comment pquest SNF 2011-04-29 15:13:25: Completed chamber clean

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Apr 29 15:13:26 PDT 2011

Previous message: Shutdown pquest SNF 2011-04-28 17:56:54: Wafer stuck again, broken when unloading
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Wet cleaned the chamber, replaced clamp springs and ran O2 plasma.

Previous message: Shutdown pquest SNF 2011-04-28 17:56:54: Wafer stuck again, broken when unloading
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