From ntayebi at snf.stanford.edu Wed Aug 10 14:25:35 2011 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Wed, 10 Aug 2011 14:25:35 -0700 Subject: Shutdown pquest SNF 2011-08-10 14:25:34: system down-someone shut down system by mistake Message-ID: system down-someone turned key off by mistake. t has to be completely restarted From eenriquez at snf.stanford.edu Wed Aug 10 15:41:24 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Aug 2011 15:41:24 -0700 Subject: Shutdown pquest SNF 2011-08-10 14:25:34: system down-someone shut down system by mistake Message-ID: Restarted the system and ran an O2 plasma. From eenriquez at snf.stanford.edu Fri Aug 12 09:13:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Aug 2011 09:13:12 -0700 Subject: Comment pquest SNF 2011-08-12 09:13:10: Completed the wet clean Message-ID: Mike completed the chamber wet clean From eenriquez at snf.stanford.edu Fri Aug 12 09:13:20 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Aug 2011 09:13:20 -0700 Subject: Comment pquest SNF 2011-07-25 09:22:34: wet clean Message-ID: Archived From zzp at snf.stanford.edu Sun Aug 21 17:27:07 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 21 Aug 2011 17:27:07 -0700 Subject: Problem pquest SNF 2011-08-21 17:27:06: Microwave power not reaching set value Message-ID: supposed to be 400 but got only 250 at 0 reflected power From mdickey at snf.stanford.edu Mon Aug 22 09:37:23 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 22 Aug 2011 09:37:23 -0700 Subject: Problem pquest SNF 2011-08-21 17:27:06: Microwave power not reaching set value Message-ID: Elmer adjusted knob on generator. Got 688-695 watts From justinwu at snf.stanford.edu Tue Aug 23 11:18:57 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Tue, 23 Aug 2011 11:18:57 -0700 Subject: Comment pquest SNF 2011-08-23 11:18:57: ECR power peculiar Message-ID: ECR was set to 200, previous runs always had constant forward power of 201 on the readouts on top. This time the power started switching oddly between 201 and 190 even when fully tuned. From usha at snf.stanford.edu Thu Aug 25 14:46:45 2011 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Thu, 25 Aug 2011 14:46:45 -0700 Subject: Shutdown pquest SNF 2011-08-25 14:46:44: Wafer stuck in chamber Message-ID: Waiting for clamp down sensor. From cbaxter at snf.stanford.edu Thu Aug 25 18:10:27 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 25 Aug 2011 18:10:27 -0700 Subject: Shutdown pquest SNF 2011-08-25 14:46:44: Wafer stuck in chamber Message-ID: Vented chamber and vacuumed broken wafer chips. From cbaxter at snf.stanford.edu Thu Aug 25 18:12:21 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 25 Aug 2011 18:12:21 -0700 Subject: Comment pquest SNF 2011-08-25 18:12:20: Wet Clean Message-ID: Wet cleaned chamber. Ok to ran fluorin process. From zzp at snf.stanford.edu Thu Aug 25 22:43:00 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Thu, 25 Aug 2011 22:43:00 -0700 Subject: Problem pquest SNF 2011-08-25 22:42:59: RF DC bias too low Message-ID: supposed to be ~-26V, but got only ~-2.5V. From eenriquez at snf.stanford.edu Fri Aug 26 10:36:44 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 10:36:44 -0700 Subject: Problem pquest SNF 2011-08-25 22:42:59: RF DC bias too low Message-ID: Turned the turbo pump back ON. From usha at snf.stanford.edu Fri Aug 26 16:59:35 2011 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Fri, 26 Aug 2011 16:59:35 -0700 Subject: Shutdown pquest SNF 2011-08-26 16:59:35: Wafer did not unload Message-ID: From cbaxter at snf.stanford.edu Fri Aug 26 17:18:34 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 26 Aug 2011 17:18:34 -0700 Subject: Shutdown pquest SNF 2011-08-26 16:59:35: Wafer did not unload Message-ID: Was able to recovered wafer on chamber.. From altamash at snf.stanford.edu Sat Aug 27 11:07:36 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sat, 27 Aug 2011 11:07:36 -0700 Subject: Problem pquest SNF 2011-08-27 11:07:35: Found 2 small broken wafer pieces Message-ID: one on loading arm and another in the load lock chamber The chamber looked clean though. From altamash at snf.stanford.edu Sat Aug 27 11:08:52 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sat, 27 Aug 2011 11:08:52 -0700 Subject: Problem pquest SNF 2011-08-27 11:08:52: MW and RF power not functioning normally Message-ID: The MW is fluctauting by 5%. The RF power sometimes does not turn on and the bias is ~ 0V. The plasma is also flickering a lot. From cbaxter at snf.stanford.edu Sat Aug 27 16:22:35 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 27 Aug 2011 16:22:35 -0700 Subject: Problem pquest SNF 2011-08-27 11:07:35: Found 2 small broken wafer pieces Message-ID: Vented chamber and I checked and verified if there is broken wafer inside the chamber, no wafer chip found. Ran o2 clean monitor bias at -23.3v. From cbaxter at snf.stanford.edu Sat Aug 27 16:22:43 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 27 Aug 2011 16:22:43 -0700 Subject: Problem pquest SNF 2011-08-27 11:08:52: MW and RF power not functioning normally Message-ID: From bucklesm at snf.stanford.edu Sat Aug 27 18:35:24 2011 From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu) Date: Sat, 27 Aug 2011 18:35:24 -0700 Subject: Problem pquest SNF 2011-08-27 18:35:24: DC bias was zero Message-ID: The DC bias was zero even though RF forward was 100. I restarted the recipe and waited ~5 minutes and the DC bias seemed normal (-62). I didn't etch in case there was something wrong though. From cbaxter at snf.stanford.edu Sat Aug 27 21:31:02 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 27 Aug 2011 21:31:02 -0700 Subject: Comment pquest SNF 2011-08-27 21:31:02: DC Bias Message-ID: Problem seem to be intermittent, will troubleshoot further tomorrow.. From eenriquez at snf.stanford.edu Mon Aug 29 09:58:48 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Aug 2011 09:58:48 -0700 Subject: Problem pquest SNF 2011-08-27 18:35:24: DC bias was zero Message-ID: Found wafer chips under the dark space shield. Cleaned the shield area. Also replaced clamp springs. From eenriquez at snf.stanford.edu Mon Aug 29 09:58:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Aug 2011 09:58:54 -0700 Subject: Comment pquest SNF 2011-08-27 21:31:02: DC Bias Message-ID: Found wafer chips under the dark space shield. Cleaned the shield area. Also replaced clamp springs.