Comment pquest SNF 2011-08-23 11:18:57: ECR power peculiar

justinwu at snf.stanford.edu justinwu at snf.stanford.edu
Tue Aug 23 11:18:57 PDT 2011

Previous message: Problem pquest SNF 2011-08-21 17:27:06: Microwave power not reaching set value
Next message: Shutdown pquest SNF 2011-08-25 14:46:44: Wafer stuck in chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

ECR was set to 200, previous runs always had constant forward power of 201 on the readouts on top. This time the power started switching oddly between 201 and 190 even when fully tuned.

Previous message: Problem pquest SNF 2011-08-21 17:27:06: Microwave power not reaching set value
Next message: Shutdown pquest SNF 2011-08-25 14:46:44: Wafer stuck in chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the pquest-pcs mailing list