Comment pquest SNF 2011-08-25 18:12:20: Wet Clean
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu Aug 25 18:12:21 PDT 2011
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Shutdown pquest SNF 2011-08-25 14:46:44: Wafer stuck in chamber
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Problem pquest SNF 2011-08-25 22:42:59: RF DC bias too low
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Wet cleaned chamber. Ok to ran fluorin process.
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Shutdown pquest SNF 2011-08-25 14:46:44: Wafer stuck in chamber
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Problem pquest SNF 2011-08-25 22:42:59: RF DC bias too low
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