Problem pquest SNF 2011-08-25 22:42:59: RF DC bias too low
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Aug 26 10:36:44 PDT 2011
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Problem pquest SNF 2011-08-25 22:42:59: RF DC bias too low
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Shutdown pquest SNF 2011-08-26 16:59:35: Wafer did not unload
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Turned the turbo pump back ON.
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Problem pquest SNF 2011-08-25 22:42:59: RF DC bias too low
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Shutdown pquest SNF 2011-08-26 16:59:35: Wafer did not unload
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