From latta at snf.stanford.edu Wed Dec 7 16:56:46 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:56:46 -0800 Subject: Comment pquest SNF 2010-08-20 16:21:25: Microwave power fluctuating Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:56:58 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:56:58 -0800 Subject: Comment pquest SNF 2010-09-20 09:59:35: Completed monthly PM Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:57:05 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:57:05 -0800 Subject: Comment pquest SNF 2010-09-23 15:30:01: MW Power Fluctuating Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:57:19 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:57:19 -0800 Subject: Comment pquest SNF 2010-10-03 17:08:11: Clamp Squeaking a Lot Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:57:29 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:57:29 -0800 Subject: Comment pquest SNF 2010-10-04 11:08:09: Wet clean chamber Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:57:36 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:57:36 -0800 Subject: Comment pquest SNF 2010-10-20 15:09:53: Chlorine vs Fluorine weeks Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:57:46 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:57:46 -0800 Subject: Comment pquest SNF 2010-10-21 10:35:14: Update clamp squeaking Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:57:54 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:57:54 -0800 Subject: Comment pquest SNF 2010-11-24 18:51:10: Completed wet clean for Cl processes Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:58:01 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:58:01 -0800 Subject: Comment pquest SNF 2010-11-24 18:51:56: Chlorine process ONLY Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:58:09 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:58:09 -0800 Subject: Comment pquest SNF 2010-12-10 18:34:41: out of logbook sheets Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:58:19 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:58:19 -0800 Subject: Comment pquest SNF 2010-12-11 11:39:39: No torch/light Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:58:34 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:58:34 -0800 Subject: Comment pquest SNF 2010-12-15 16:05:25: Pressuer zero drift? Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:58:43 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:58:43 -0800 Subject: Comment pquest SNF 2011-01-03 15:19:30: Maintenance performed Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:58:50 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:58:50 -0800 Subject: Comment pquest SNF 2011-05-13 15:57:50: Light pen "trick" Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:59:00 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:59:00 -0800 Subject: Comment pquest SNF 2011-08-23 11:18:57: ECR power peculiar Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:59:11 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:59:11 -0800 Subject: Comment pquest SNF 2011-09-27 12:32:38: ECR power fluctuating Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:59:19 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:59:19 -0800 Subject: Comment pquest SNF 2011-10-08 15:32:11: Abnormal Cl2/BCL3 GaAs Etch Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 16:59:27 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:59:27 -0800 Subject: Comment pquest SNF 2011-11-04 12:14:28: Completed wet clean Message-ID: archived From robertchen at snf.stanford.edu Wed Dec 7 19:10:14 2011 From: robertchen at snf.stanford.edu (robertchen at snf.stanford.edu) Date: Wed, 7 Dec 2011 19:10:14 -0800 Subject: Problem pquest SNF 2011-12-07 19:10:13: Left LL Hinge Broken Message-ID: The left LL hinge is broken. This is BAD because if the lid is not seated properly on the black o-ring/gasket, the pump will run but there will be a leak to atmosphere. The first recipe I ran had this problem -- I hit ESC/Stop, then Close in the RUN menu, then load RUN up again and hit LL->ATM. The Process Pump Alarm may have been triggered, but the LL pump still pumps down to the program interlock, so I think it's okay. JUST 100% ABSOLUTELY MAKE SURE THE LID COVERS THE O-RING!!! From mdickey at snf.stanford.edu Fri Dec 9 08:09:29 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 9 Dec 2011 08:09:29 -0800 Subject: Problem pquest SNF 2011-12-07 19:10:13: Left LL Hinge Broken Message-ID: Retapped the holes in the door. Will install heli-coils at a late date. Door is better now. From eenriquez at snf.stanford.edu Mon Dec 12 10:01:44 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 10:01:44 -0800 Subject: Shutdown pquest SNF 2011-12-12 10:01:43: Scheduled shutdown Message-ID: From cbaxter at snf.stanford.edu Tue Dec 13 18:43:44 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 13 Dec 2011 18:43:44 -0800 Subject: Comment pquest SNF 2011-12-13 18:43:43: Wet clean Message-ID: Wetclean completed..