From eenriquez at snf.stanford.edu  Fri Feb  4 09:51:21 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 4 Feb 2011 09:51:21 -0800
Subject: Comment pquest SNF 2011-01-21 11:05:05: Completed chamber wet clean.
Message-ID: <mailman.1673.1357938573.25846.pquest-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Fri Feb  4 09:51:34 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 4 Feb 2011 09:51:34 -0800
Subject: Comment pquest SNF 2011-02-04 09:51:34: Completed chamber clean
Message-ID: <mailman.1674.1357938573.25846.pquest-pcs@snf.stanford.edu>




From justinwu at snf.stanford.edu  Mon Feb  7 20:28:49 2011
From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu)
Date: Mon, 7 Feb 2011 20:28:49 -0800
Subject: Comment pquest SNF 2011-02-07 20:28:48: Adaptive Pressure Controller
Message-ID: <mailman.1675.1357938573.25846.pquest-pcs@snf.stanford.edu>

Not sure if it's working correctly; it appears to be taking longer than before to reach desired pressure.
E.g.
The recipe calls for 20mT strike step for 2s before returning to 10mT for the plasma, but the valve actually opens rather than closes and the pressure drops to 1mT and wobbles for several seconds, before finally stabilizing at 10mT.



From jimkruger at yahoo.com  Tue Feb  8 06:08:01 2011
From: jimkruger at yahoo.com (jim kruger)
Date: Tue, 8 Feb 2011 06:08:01 -0800 (PST)
Subject: Comment pquest SNF 2011-02-07 20:28:48: Adaptive Pressure Controller
In-Reply-To: <20110208042849.69DFF45611B@smtp-unencrypted.stanford.edu>
Message-ID: <758068.34807.qm@web38903.mail.mud.yahoo.com>

20 mTorr is probably a little high, strike should not be too difficult at 10 mTorr. ?2 sec is not enough time. 2 or 3 sec of higher power(s) is usually effective.What is your recipe name, please list details. ?What are you etching? ?Why not use ?5 mTorr, the sweet spot?

jim
--- On Mon, 2/7/11, justinwu at snf.stanford.edu <justinwu at snf.stanford.edu> wrote:

From: justinwu at snf.stanford.edu <justinwu at snf.stanford.edu>
Subject: Comment pquest SNF 2011-02-07 20:28:48: Adaptive Pressure Controller
To: pquest-pcs at snf.stanford.edu
Date: Monday, February 7, 2011, 8:28 PM

Not sure if it's working correctly; it appears to be taking longer than before to reach desired pressure.
E.g.
The recipe calls for 20mT strike step for 2s before returning to 10mT for the plasma, but the valve actually opens rather than closes and the pressure drops to 1mT and wobbles for several seconds, before finally stabilizing at 10mT.




      
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From dongl at snf.stanford.edu  Tue Feb 15 23:12:28 2011
From: dongl at snf.stanford.edu (dongl at snf.stanford.edu)
Date: Tue, 15 Feb 2011 23:12:28 -0800
Subject: Shutdown pquest SNF 2011-02-15 23:12:28: Pquest is down due to "emergency stop"
Message-ID: <mailman.1676.1357938573.25846.pquest-pcs@snf.stanford.edu>

When I load samples, I clicked the wrong buttion "unload" on the screen. In order to prevent breaking wafers inside of the chamber, I pushed the "emergency stop" down. Now the power is shut down, but the chamber should be OK. My wafers are in the load lock now and I left a note next to it. Hopefully the Emergency stop won't damage the pumps or other hardware. It just needs to be restarted. Sorry for the inconvenience! 



From eenriquez at snf.stanford.edu  Wed Feb 16 09:47:43 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 16 Feb 2011 09:47:43 -0800
Subject: Shutdown pquest SNF 2011-02-15 23:12:28: Pquest is down due to "emergency stop"
Message-ID: <mailman.1677.1357938573.25846.pquest-pcs@snf.stanford.edu>

Restarted the system.  Cycled a wafer and ran an O2 plasma.



From eenriquez at snf.stanford.edu  Fri Feb 18 10:26:30 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 18 Feb 2011 10:26:30 -0800
Subject: Shutdown pquest SNF 2011-02-18 10:26:30: chamber clean and pm
Message-ID: <mailman.1678.1357938573.25846.pquest-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Feb 18 15:01:16 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 18 Feb 2011 15:01:16 -0800
Subject: Shutdown pquest SNF 2011-02-18 10:26:30: chamber clean and pm
Message-ID: <mailman.1679.1357938573.25846.pquest-pcs@snf.stanford.edu>

Completed chamber wet clean and monthly pm.  Replaced damaged cooling helium o-ring.  Baked out the new o-ring for 3 hours at 190 C.  Cycled wafers with no handling problem.  The cooling He flow is high at 7.4.  Need to level the clamp.



From eenriquez at snf.stanford.edu  Fri Feb 18 15:02:34 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 18 Feb 2011 15:02:34 -0800
Subject: Comment pquest SNF 2011-02-07 20:28:48: Adaptive Pressure Controller
Message-ID: <mailman.1680.1357938573.25846.pquest-pcs@snf.stanford.edu>

Calibrated the throttle valve controller.



From eenriquez at snf.stanford.edu  Fri Feb 18 15:02:49 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 18 Feb 2011 15:02:49 -0800
Subject: Comment pquest SNF 2011-02-04 09:51:34: Completed chamber clean
Message-ID: <mailman.1681.1357938573.25846.pquest-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Fri Feb 18 15:03:09 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 18 Feb 2011 15:03:09 -0800
Subject: Comment pquest SNF 2011-02-18 15:03:09: Completed chamber wet clean
Message-ID: <mailman.1682.1357938573.25846.pquest-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Feb 18 15:03:53 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 18 Feb 2011 15:03:53 -0800
Subject: Problem pquest SNF 2011-02-18 15:03:52: High helium cooling flow
Message-ID: <mailman.1683.1357938573.25846.pquest-pcs@snf.stanford.edu>

The cooling helium flow is high.  Need to level the clamp.



From cbaxter at snf.stanford.edu  Sun Feb 27 18:49:57 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sun, 27 Feb 2011 18:49:57 -0800
Subject: Comment pquest SNF 2011-02-27 18:49:56: Clamp
Message-ID: <mailman.1684.1357938573.25846.pquest-pcs@snf.stanford.edu>

Aadjusted clamp force and level, but lowest backside
he i can get is 8sccm..



From usha at snf.stanford.edu  Mon Feb 28 11:33:07 2011
From: usha at snf.stanford.edu (usha at snf.stanford.edu)
Date: Mon, 28 Feb 2011 11:33:07 -0800
Subject: Problem pquest SNF 2011-02-28 11:33:07: High Backside He
Message-ID: <mailman.1685.1357938573.25846.pquest-pcs@snf.stanford.edu>

Backside He flow 8.6. Effectively no cooling. Could not do development as sel to resist is important and will be affected by cooling.  Need to be fixed.