Comment pquest SNF 2011-02-07 20:28:48: Adaptive Pressure Controller

jim kruger jimkruger at yahoo.com
Tue Feb 8 06:08:01 PST 2011


20 mTorr is probably a little high, strike should not be too difficult at 10 mTorr.  2 sec is not enough time. 2 or 3 sec of higher power(s) is usually effective.What is your recipe name, please list details.  What are you etching?  Why not use  5 mTorr, the sweet spot?

jim
--- On Mon, 2/7/11, justinwu at snf.stanford.edu <justinwu at snf.stanford.edu> wrote:

From: justinwu at snf.stanford.edu <justinwu at snf.stanford.edu>
Subject: Comment pquest SNF 2011-02-07 20:28:48: Adaptive Pressure Controller
To: pquest-pcs at snf.stanford.edu
Date: Monday, February 7, 2011, 8:28 PM

Not sure if it's working correctly; it appears to be taking longer than before to reach desired pressure.
E.g.
The recipe calls for 20mT strike step for 2s before returning to 10mT for the plasma, but the valve actually opens rather than closes and the pressure drops to 1mT and wobbles for several seconds, before finally stabilizing at 10mT.




      
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