Shutdown pquest SNF 2011-02-15 23:12:28: Pquest is down due to "emergency stop"

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Feb 16 09:47:43 PST 2011


Restarted the system.  Cycled a wafer and ran an O2 plasma.




More information about the pquest-pcs mailing list