From eenriquez at snf.stanford.edu Mon Jan 3 08:18:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Jan 2011 08:18:35 -0800 Subject: Problem pquest SNF 2010-10-18 11:03:41: Clamp making noise Message-ID: Cleaned and lubricated the clamp drive mechanism. From eenriquez at snf.stanford.edu Mon Jan 3 15:19:31 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Jan 2011 15:19:31 -0800 Subject: Comment pquest SNF 2011-01-03 15:19:30: Maintenance performed Message-ID: Repaired clamp noise. Wet cleaned the chamber. Repaired the gate valve leak From eenriquez at snf.stanford.edu Fri Jan 21 11:05:06 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 Jan 2011 11:05:06 -0800 Subject: Comment pquest SNF 2011-01-21 11:05:05: Completed chamber wet clean. Message-ID: From gshambat at snf.stanford.edu Tue Jan 25 15:30:45 2011 From: gshambat at snf.stanford.edu (gshambat at snf.stanford.edu) Date: Tue, 25 Jan 2011 15:30:45 -0800 Subject: Shutdown pquest SNF 2011-01-25 15:30:44: Broken wafer Message-ID: Wafer broke upon unload From cbaxter at snf.stanford.edu Tue Jan 25 16:33:08 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 25 Jan 2011 16:33:08 -0800 Subject: Shutdown pquest SNF 2011-01-25 15:30:44: Broken wafer Message-ID: Vacuum broken wafer chips and wiped down chamber with water and ipa.