Shutdown pquest SNF 2011-01-25 15:30:44: Broken wafer
gshambat at snf.stanford.edu
gshambat at snf.stanford.edu
Tue Jan 25 15:30:45 PST 2011
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Comment pquest SNF 2011-01-21 11:05:05: Completed chamber wet clean.
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Shutdown pquest SNF 2011-01-25 15:30:44: Broken wafer
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Wafer broke upon unload
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Comment pquest SNF 2011-01-21 11:05:05: Completed chamber wet clean.
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Shutdown pquest SNF 2011-01-25 15:30:44: Broken wafer
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