From mtang at snf.stanford.edu Fri Jul 1 15:11:43 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 1 Jul 2011 15:11:43 -0700 Subject: Problem pquest SNF 2011-07-01 15:11:42: Helium backside flow is high Message-ID: It's running at nearly 10 sccm -- it usually runs much less than this. This might result in less efficient cooling of substrates but should not damage the machine. From mdickey at snf.stanford.edu Fri Jul 8 10:01:27 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 8 Jul 2011 10:01:27 -0700 Subject: Comment pquest SNF 2011-07-08 10:01:26: wet clean Message-ID: Performed wet clean and replaced clamp springs. Ran O3 recipe From eenriquez at snf.stanford.edu Fri Jul 8 10:10:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Jul 2011 10:10:34 -0700 Subject: Problem pquest SNF 2011-07-01 15:11:42: Helium backside flow is high Message-ID: Repalced clamp springs. Now the backside He flow is 7.0 sccm. From eenriquez at snf.stanford.edu Thu Jul 14 12:42:10 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jul 2011 12:42:10 -0700 Subject: Comment pquest SNF 2011-06-13 11:48:55: chip pieces in viewport Message-ID: Cleaned chamber From eenriquez at snf.stanford.edu Thu Jul 14 12:42:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jul 2011 12:42:23 -0700 Subject: Comment pquest SNF 2011-06-13 16:57:47: Logsheets, chamber clean Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 14 12:42:32 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jul 2011 12:42:32 -0700 Subject: Comment pquest SNF 2011-06-14 09:17:10: Completed chamber clean Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 14 12:42:43 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jul 2011 12:42:43 -0700 Subject: Comment pquest SNF 2011-04-29 15:13:25: Completed chamber clean Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 14 13:23:26 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jul 2011 13:23:26 -0700 Subject: Comment pquest SNF 2011-06-24 09:45:47: wet clean Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 14 13:23:36 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jul 2011 13:23:36 -0700 Subject: Comment pquest SNF 2011-05-13 09:06:48: chamber cleaned Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 14 13:24:26 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jul 2011 13:24:26 -0700 Subject: Comment pquest SNF 2011-04-18 19:28:17: Pressure reading Message-ID: Re-zeroed the pressure reading From eenriquez at snf.stanford.edu Thu Jul 14 13:25:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jul 2011 13:25:52 -0700 Subject: Comment pquest SNF 2011-06-22 15:36:07: Light pen is hard to use Message-ID: Cleaned the light pen tip From mdickey at snf.stanford.edu Mon Jul 25 09:22:35 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 25 Jul 2011 09:22:35 -0700 Subject: Comment pquest SNF 2011-07-25 09:22:34: wet clean Message-ID: Finished wet clean, replaced clamp springs From altamash at snf.stanford.edu Tue Jul 26 13:31:32 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Tue, 26 Jul 2011 13:31:32 -0700 Subject: Problem pquest SNF 2011-07-26 13:31:31: Clamp squeaking again Message-ID: From eenriquez at snf.stanford.edu Wed Jul 27 07:34:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jul 2011 07:34:42 -0700 Subject: Comment pquest SNF 2011-07-08 10:01:26: wet clean Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 28 13:45:56 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 28 Jul 2011 13:45:56 -0700 Subject: Problem pquest SNF 2011-07-26 13:31:31: Clamp squeaking again Message-ID: Lubricated the clamp drive mechanism.