Problem pquest SNF 2011-07-01 15:11:42: Helium backside flow is high

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Jul 1 15:11:43 PDT 2011


It's running at nearly 10 sccm -- it usually runs much less than this.  This  might result in less efficient cooling of substrates but should not damage the machine.




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