Problem pquest SNF 2011-07-01 15:11:42: Helium backside flow is high
mtang at snf.stanford.edu
mtang at snf.stanford.edu
Fri Jul 1 15:11:43 PDT 2011
It's running at nearly 10 sccm -- it usually runs much less than this. This might result in less efficient cooling of substrates but should not damage the machine.
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