Comment pquest SNF 2011-07-08 10:01:26: wet clean
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Fri Jul 8 10:01:27 PDT 2011
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Problem pquest SNF 2011-07-01 15:11:42: Helium backside flow is high
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Comment pquest SNF 2011-07-08 10:01:26: wet clean
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Performed wet clean and replaced clamp springs. Ran O3 recipe
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Problem pquest SNF 2011-07-01 15:11:42: Helium backside flow is high
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Comment pquest SNF 2011-07-08 10:01:26: wet clean
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