Problem pquest SNF 2011-02-28 11:33:07: High Backside He

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Mar 3 11:23:30 PST 2011


Verified that the clamp is level.  Replaced one of the clamp springs.  Leveled the clamp fingers.  
Initial leak rate was 4.3 sccm but after I ran a 10 min Oxygen3 recipe, the leak rate increased to 5.7 sccm.




More information about the pquest-pcs mailing list