Shutdown pquest SNF 2011-03-21 17:25:47: Broke a wafer
justinwu at snf.stanford.edu
justinwu at snf.stanford.edu
Mon Mar 21 17:25:47 PDT 2011
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Comment pquest SNF 2011-03-21 10:35:39: Pumped out O2 line
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Shutdown pquest SNF 2011-03-21 17:25:47: Broke a wafer
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Wafer broke in the plasma chamber.
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Comment pquest SNF 2011-03-21 10:35:39: Pumped out O2 line
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Shutdown pquest SNF 2011-03-21 17:25:47: Broke a wafer
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