Problem pquest SNF 2011-03-29 18:24:23: Backside He flow is high

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Tue Mar 29 18:24:23 PDT 2011


I find Backside He flow is 7.9 or 8 sccm on 2 different carrier wafers.
The "no wafer" flow is 8.8 at Room Temperature.  This implies there is essentially no He wetting for cooling so wafer will be running hot, especially for higher power etches.  Be aware.




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