From cbaxter at snf.stanford.edu Sat May 7 06:33:15 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 May 2011 06:33:15 -0700 Subject: Shutdown pquest SNF 2011-05-06 16:57:28: Wafer broken Message-ID: Cleaned up broken wafer inside the chamber and ran 30min o2 clean.. From mtang at snf.stanford.edu Tue May 10 13:03:39 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 10 May 2011 13:03:39 -0700 Subject: Comment pquest SNF 2011-05-10 13:03:38: Cl2 shutdown Wed. 5/11 Message-ID: Cl2 will be shutdown from 6:30-4:30 on Wednesday, 5/11. System is OK for other gases. From mtang at snf.stanford.edu Wed May 11 06:17:07 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 11 May 2011 06:17:07 -0700 Subject: Problem pquest SNF 2011-05-11 06:17:07: Cl2 unavailable Message-ID: Maintenance work being done on the corrosives vault duct; Cl2 is unavailable, due back on late this afternoon. Machine is available for processes not using Cl2. From mtang at snf.stanford.edu Wed May 11 14:48:42 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 11 May 2011 14:48:42 -0700 Subject: Problem pquest SNF 2011-05-11 06:17:07: Cl2 unavailable Message-ID: It's back on! From carterlin at snf.stanford.edu Wed May 11 16:48:47 2011 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Wed, 11 May 2011 16:48:47 -0700 Subject: Problem pquest SNF 2011-05-11 16:48:46: accidentally knock off the pen holder Message-ID: holder broken pieces on the table to the right of pquest From eenriquez at snf.stanford.edu Wed May 11 18:41:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 May 2011 18:41:34 -0700 Subject: Comment pquest SNF 2011-05-11 18:41:34: Update broken pen holder Message-ID: Removed broken pen holder. Need repair broken piece. From eenriquez at snf.stanford.edu Thu May 12 11:29:55 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 May 2011 11:29:55 -0700 Subject: Comment pquest SNF 2011-05-11 18:41:34: Update broken pen holder Message-ID: Archived From eenriquez at snf.stanford.edu Thu May 12 11:30:08 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 May 2011 11:30:08 -0700 Subject: Problem pquest SNF 2011-05-11 16:48:46: accidentally knock off the pen holder Message-ID: Repaired the pen holder From eenriquez at snf.stanford.edu Thu May 12 11:30:16 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 May 2011 11:30:16 -0700 Subject: Comment pquest SNF 2011-05-10 13:03:38: Cl2 shutdown Wed. 5/11 Message-ID: Archived From mdickey at snf.stanford.edu Fri May 13 09:06:48 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 13 May 2011 09:06:48 -0700 Subject: Comment pquest SNF 2011-05-13 09:06:48: chamber cleaned Message-ID: Performed chamber clean From jimkruger at snf.stanford.edu Fri May 13 15:52:30 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 13 May 2011 15:52:30 -0700 Subject: Shutdown pquest SNF 2011-05-13 15:52:29: Broken wafer in system Message-ID: Probably operator error, pushed LOAD instead of UNLOAD? From jimkruger at snf.stanford.edu Fri May 13 15:57:50 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 13 May 2011 15:57:50 -0700 Subject: Comment pquest SNF 2011-05-13 15:57:50: Light pen "trick" Message-ID: Elmer showed me that if the light pen is being difficult, especially for the top row of buttons: Start with the light pen above the button and drag it down on to the button, then away from scrren as usual. From eenriquez at snf.stanford.edu Mon May 16 10:11:26 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 May 2011 10:11:26 -0700 Subject: Shutdown pquest SNF 2011-05-13 15:52:29: Broken wafer in system Message-ID: cleaned the chamber, cycled wafers to check handling and ran O2 plasma. From eenriquez at snf.stanford.edu Tue May 17 10:13:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 May 2011 10:13:19 -0700 Subject: Shutdown pquest SNF 2011-05-16 22:04:28: Wafer broke inside chamber Message-ID: Found two wafers loaded in the chamber. Recovered both wafers and cleaned the chamber. Ran O2 plasma. From altamash at snf.stanford.edu Tue May 24 12:58:04 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Tue, 24 May 2011 12:58:04 -0700 Subject: Comment pquest SNF 2011-05-24 12:58:03: out of log sheets Message-ID: