Shutdown pquest SNF 2011-05-06 16:57:28: Wafer broken

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sat May 7 06:33:15 PDT 2011

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Cleaned up broken wafer inside the chamber and ran 30min
o2 clean..

Next message: Comment pquest SNF 2011-05-10 13:03:38: Cl2 shutdown Wed. 5/11
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