Shutdown pquest SNF 2011-05-16 22:04:28: Wafer broke inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue May 17 10:13:19 PDT 2011

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Found two wafers loaded in the chamber.  Recovered both wafers and cleaned the chamber.  Ran O2 plasma.

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