From eenriquez at snf.stanford.edu Tue Nov 1 09:07:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Nov 2011 09:07:34 -0700 Subject: Shutdown pquest SNF 2011-11-01 09:07:34: BCl3 cylinder change Message-ID: From eenriquez at snf.stanford.edu Tue Nov 1 15:33:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Nov 2011 15:33:01 -0700 Subject: Comment pquest SNF 2011-11-01 15:33:00: Update BCl3 cylinder change. Message-ID: Cylinder is under 24 hr leak check. It should be ready tomorrow afternoon. From eenriquez at snf.stanford.edu Wed Nov 2 13:34:00 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Nov 2011 13:34:00 -0700 Subject: Shutdown pquest SNF 2011-11-01 09:07:34: BCl3 cylinder change Message-ID: BCl3 is not available. Up for processes that do not require BCl3. From eenriquez at snf.stanford.edu Wed Nov 2 13:34:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Nov 2011 13:34:21 -0700 Subject: Problem pquest SNF 2011-11-02 13:34:21: BCl3 is unavailable Message-ID: From latta at snf.stanford.edu Wed Nov 2 15:21:12 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 2 Nov 2011 15:21:12 -0700 Subject: Comment pquest SNF 2011-11-01 15:33:00: Update BCl3 cylinder change. Message-ID: BCl3 checked at p5000. From latta at snf.stanford.edu Wed Nov 2 15:21:43 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 2 Nov 2011 15:21:43 -0700 Subject: Comment pquest SNF 2011-10-14 14:38:42: Update BCl3 Message-ID: archived From eenriquez at snf.stanford.edu Wed Nov 2 15:23:49 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Nov 2011 15:23:49 -0700 Subject: Problem pquest SNF 2011-10-05 11:13:18: Needs a process qual Message-ID: Archived From eenriquez at snf.stanford.edu Wed Nov 2 15:28:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Nov 2011 15:28:57 -0700 Subject: Problem pquest SNF 2011-11-02 13:34:21: BCl3 is unavailable Message-ID: BCl3 is now available. From eenriquez at snf.stanford.edu Fri Nov 4 12:13:26 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Nov 2011 12:13:26 -0700 Subject: Comment pquest SNF 2011-10-21 09:03:31: wet clean Message-ID: Archived From eenriquez at snf.stanford.edu Fri Nov 4 12:14:03 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Nov 2011 12:14:03 -0700 Subject: Comment pquest SNF 2011-10-07 11:33:15: Wet Clean Message-ID: Archived From eenriquez at snf.stanford.edu Fri Nov 4 12:14:13 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Nov 2011 12:14:13 -0700 Subject: Comment pquest SNF 2011-09-23 10:21:41: Completed wet clean. Message-ID: Archived From eenriquez at snf.stanford.edu Fri Nov 4 12:14:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Nov 2011 12:14:28 -0700 Subject: Comment pquest SNF 2011-11-04 12:14:28: Completed wet clean Message-ID: From bucklesm at snf.stanford.edu Tue Nov 8 14:49:31 2011 From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu) Date: Tue, 8 Nov 2011 14:49:31 -0800 Subject: Problem pquest SNF 2011-11-08 14:49:30: load arm sensor Message-ID: As I was unloading, the load arm reached the wafer, and then the motors started making a lot of noise and nothing else happened for a while. Eventually I pressed esc, and now the arm is still in the chamber. From eenriquez at snf.stanford.edu Wed Nov 9 14:34:56 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Nov 2011 14:34:56 -0800 Subject: Problem pquest SNF 2011-11-08 14:49:30: load arm sensor Message-ID: Another user was able to reset the system. Cycled a wafer without a problem. From kgc at snf.stanford.edu Mon Nov 14 11:39:33 2011 From: kgc at snf.stanford.edu (kgc at snf.stanford.edu) Date: Mon, 14 Nov 2011 11:39:33 -0800 Subject: Problem pquest SNF 2011-11-14 11:39:33: unsteady microwave power Message-ID: The reflected power kept spiking up to 40 From eenriquez at snf.stanford.edu Tue Nov 15 09:44:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Nov 2011 09:44:01 -0800 Subject: Problem pquest SNF 2011-11-14 11:39:33: unsteady microwave power Message-ID: Was not able to observe the problem. Ran the oxygen3 recipe. Reflected power was very stable. From latta at snf.stanford.edu Thu Nov 17 11:00:49 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 Nov 2011 11:00:49 -0800 Subject: Comment pquest SNF 2011-11-17 11:00:48: J Kruger's comments on unstable plasma Message-ID: I see several recent reports of plasma instability. When making such a report, please include the detailed recipe, such problems are usually very recipe dependent. If your recipe is having trouble, try a more standard recipe (i.e. oxygen), tune it up, then creep back with the tuning from there to see if your recipe works better. Include in your report how the standard recipe worked. On most systems, do not run high reflected power for more than ~ 20 seconds while attempting to tune. Reduce power unttil you can find the tuning values, then increase , re-tuning as you go. High reflected power can degrade the RF generator. The one exception to this is PQuest MICROWAVE POWER (not the RF). On PQuest, the reflected microwave power is directed to a water-cooled dummy load so will not damage the generator. Thus it is OK to run moderate reflected power if that is the only way to keep things stable. I believe the only downsides are larger carbon footprint and the blow to your ego that you were not able to make it work better. I am always happy to consult on etch recipes. jim From mtang at snf.stanford.edu Thu Nov 17 16:52:11 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 17 Nov 2011 16:52:11 -0800 Subject: Problem pquest SNF 2011-11-17 16:52:11: No chlorine Message-ID: It looks like the chlorine regulator may have failed, so there is no chlorine to the lab. Will have more of an update tomorrow. From mdickey at snf.stanford.edu Fri Nov 18 09:56:49 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 18 Nov 2011 09:56:49 -0800 Subject: Comment pquest SNF 2011-11-18 09:56:49: wet clean Message-ID: wet clean complete From eenriquez at snf.stanford.edu Fri Nov 18 10:57:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Nov 2011 10:57:23 -0800 Subject: Problem pquest SNF 2011-11-17 16:52:11: No chlorine Message-ID: Chlorine is now available From fpurkl at snf.stanford.edu Tue Nov 29 11:24:45 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Tue, 29 Nov 2011 11:24:45 -0800 Subject: Shutdown pquest SNF 2011-11-29 11:24:45: wafer holder broke - wafer still inside Message-ID: After the setup etch, the dummy wafer didn't come back out off the chamber. Looking into the chamber it seems like part of the ring pressing down the wafer broke of and is sitting on the chuck. From cbaxter at snf.stanford.edu Tue Nov 29 16:56:51 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 Nov 2011 16:56:51 -0800 Subject: Shutdown pquest SNF 2011-11-29 11:24:45: wafer holder broke - wafer still inside Message-ID: Removed broken wafer inside the chamber, noticed the teflon insert insulator on the clamp, a piece of the teflon insert broke off. Removed clamp and temporary put kapton tape to hold teflon insert in one piece on the clamp. Were in process of machining a new clamp teflon insert... From fpurkl at snf.stanford.edu Wed Nov 30 12:01:31 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Wed, 30 Nov 2011 12:01:31 -0800 Subject: Shutdown pquest SNF 2011-11-30 12:01:31: Wafer broke Message-ID: Wafer came out of the chamber broken in half. Second half possibly still in the chamber. From fpurkl at snf.stanford.edu Wed Nov 30 12:07:40 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Wed, 30 Nov 2011 12:07:40 -0800 Subject: Comment pquest SNF 2011-11-30 12:07:40: Accidental shutdown - please clear Message-ID: Sorry, I accidently shut down PQuest instead of Matrix. PQuest is working fine. Any staff, please clear the shutdown. From jhaydon at snf.stanford.edu Wed Nov 30 12:15:55 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 30 Nov 2011 12:15:55 -0800 Subject: Shutdown pquest SNF 2011-11-30 12:01:31: Wafer broke Message-ID: From jhaydon at snf.stanford.edu Wed Nov 30 12:16:02 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 30 Nov 2011 12:16:02 -0800 Subject: Comment pquest SNF 2011-11-30 12:07:40: Accidental shutdown - please clear Message-ID: