From eenriquez at snf.stanford.edu Wed Oct 5 11:08:30 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Oct 2011 11:08:30 -0700 Subject: Problem pquest SNF 2011-09-27 10:04:55: BCl3 gas low Message-ID: Replaced BCl3 cylinder. Flowed gas to the tool. Needs a process qual. From eenriquez at snf.stanford.edu Wed Oct 5 11:13:18 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Oct 2011 11:13:18 -0700 Subject: Problem pquest SNF 2011-10-05 11:13:18: Needs a process qual Message-ID: From cbaxter at snf.stanford.edu Fri Oct 7 11:33:16 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 7 Oct 2011 11:33:16 -0700 Subject: Comment pquest SNF 2011-10-07 11:33:15: Wet Clean Message-ID: Monthly wet clean completed, chamber set for Cl2 process.. From khu834 at snf.stanford.edu Sat Oct 8 15:32:12 2011 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Sat, 8 Oct 2011 15:32:12 -0700 Subject: Comment pquest SNF 2011-10-08 15:32:11: Abnormal Cl2/BCL3 GaAs Etch Message-ID: The color of the plasma for 15sccm Ar2, 1.5sccm Cl2, 10sccm BCL3 usually appear green/ yellowish at 200W ECR. However, the plasma is bluish/white in color today. The etched GaAs surface is very rough. This is perhaps just an isolated incident. All gas flow appear normal. Will try another sample in a few days. From eenriquez at snf.stanford.edu Mon Oct 10 15:17:36 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Oct 2011 15:17:36 -0700 Subject: Comment pquest SNF 2011-10-10 15:17:35: Possible BCl3 leak or contamination Message-ID: Investigating the BCl3 line for a possible leak or contamination From eenriquez at snf.stanford.edu Tue Oct 11 13:27:36 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Oct 2011 13:27:36 -0700 Subject: Comment pquest SNF 2011-10-11 13:27:36: Update BCl3 Message-ID: Perfoming test to verify that the BCl3 gas in not contaminated. BCl3 gas line to the cylinder valve leak up rate was good. Gas panel pressure retention test was also good. Next test is to re-install the old cylinder. From armandhr at snf.stanford.edu Wed Oct 12 14:57:08 2011 From: armandhr at snf.stanford.edu (armandhr at snf.stanford.edu) Date: Wed, 12 Oct 2011 14:57:08 -0700 Subject: Problem pquest SNF 2011-10-12 14:57:08: Out of BCl3 Message-ID: Just to clarify recent reports, it appears that BCl3 is now unavailable. From eenriquez at snf.stanford.edu Fri Oct 14 14:29:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Oct 2011 14:29:21 -0700 Subject: Problem pquest SNF 2011-10-12 14:57:08: Out of BCl3 Message-ID: BCl3 is now available From eenriquez at snf.stanford.edu Fri Oct 14 14:35:53 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Oct 2011 14:35:53 -0700 Subject: Comment pquest SNF 2011-10-10 15:17:35: Possible BCl3 leak or contamination Message-ID: Pumped on the cylinder for about 15 minutes. Ran a BCl3 plasma. Coler seems more normal. From eenriquez at snf.stanford.edu Fri Oct 14 14:36:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Oct 2011 14:36:07 -0700 Subject: Comment pquest SNF 2011-10-11 13:27:36: Update BCl3 Message-ID: Archived From eenriquez at snf.stanford.edu Fri Oct 14 14:38:43 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Oct 2011 14:38:43 -0700 Subject: Comment pquest SNF 2011-10-14 14:38:42: Update BCl3 Message-ID: Pumped on the gas cylinder for about 15 minutes. Ran a BCl3 recipe. Now the color is a more normal greenish white. Needs a process qualification From mdickey at snf.stanford.edu Fri Oct 21 09:03:31 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 21 Oct 2011 09:03:31 -0700 Subject: Comment pquest SNF 2011-10-21 09:03:31: wet clean Message-ID: wet clean complete. He. flow 4.5 From usha at snf.stanford.edu Sat Oct 22 18:39:13 2011 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Sat, 22 Oct 2011 18:39:13 -0700 Subject: Shutdown pquest SNF 2011-10-22 18:39:13: Wafer broke inside chamber Message-ID: Piece of wafer still inside From cbaxter at snf.stanford.edu Sun Oct 23 21:24:37 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Oct 2011 21:24:37 -0700 Subject: Shutdown pquest SNF 2011-10-22 18:39:13: Wafer broke inside chamber Message-ID: Removed broken wafer chips and wiped down chamber water and ipa. Ran 30mins O2 plasma.. From mdickey at snf.stanford.edu Wed Oct 26 05:23:52 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 26 Oct 2011 05:23:52 -0700 Subject: Shutdown pquest SNF 2011-10-26 05:23:51: water Message-ID: down for flowmeter tie in From mdickey at snf.stanford.edu Wed Oct 26 09:09:21 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 26 Oct 2011 09:09:21 -0700 Subject: Shutdown pquest SNF 2011-10-26 05:23:51: water Message-ID: tie in done From justinwu at snf.stanford.edu Wed Oct 26 17:55:47 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Wed, 26 Oct 2011 17:55:47 -0700 Subject: Problem pquest SNF 2011-10-26 17:55:46: Load lock hinge Message-ID: Screws came out. From sgchong at snf.stanford.edu Wed Oct 26 22:20:40 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Wed, 26 Oct 2011 22:20:40 -0700 Subject: Shutdown pquest SNF 2011-10-26 22:20:40: wafer in chamber - not sitting properly on holder Message-ID: The wafer is in the chamber, and it is not sitting properly on the holder. I pressed ESC and left the tool there. From mdickey at snf.stanford.edu Thu Oct 27 09:16:54 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 27 Oct 2011 09:16:54 -0700 Subject: Shutdown pquest SNF 2011-10-26 22:20:40: wafer in chamber - not sitting properly on holder Message-ID: recovered wafer and fixed the loadlock door From sgchong at snf.stanford.edu Thu Oct 27 13:19:12 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Thu, 27 Oct 2011 13:19:12 -0700 Subject: Shutdown pquest SNF 2011-10-27 13:19:12: quartz wafer broken inside chamber Message-ID: Wafer holder went in with a quartz wafer when the clamps were up and broke running into the clamps. From cbaxter at snf.stanford.edu Thu Oct 27 17:45:01 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 27 Oct 2011 17:45:01 -0700 Subject: Shutdown pquest SNF 2011-10-27 13:19:12: quartz wafer broken inside chamber Message-ID: Removed broken quartz wafer, one of the vesple lifter pin broke and can't find a replacement lifter pin. Removed the two other vesple lifter pins and installed three new teflon lifter pins to replace the vesple pins. The teflon pins are only temporary till we can make new vesple lifter pins. I wiped down the chamber and ran 30mins O2 plasma. From zzp at snf.stanford.edu Thu Oct 27 20:59:10 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Thu, 27 Oct 2011 20:59:10 -0700 Subject: Shutdown pquest SNF 2011-10-27 20:59:10: wafer stuck Message-ID: From mdickey at snf.stanford.edu Fri Oct 28 10:08:35 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 28 Oct 2011 10:08:35 -0700 Subject: Shutdown pquest SNF 2011-10-27 20:59:10: wafer stuck Message-ID: Retrieved wafer and Elmer tightened the drive mechanism From eenriquez at snf.stanford.edu Fri Oct 28 14:31:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Oct 2011 14:31:42 -0700 Subject: Problem pquest SNF 2011-10-26 17:55:46: Load lock hinge Message-ID: Mike repaire the hinge.