Comment pquest SNF 2011-10-08 15:32:11: Abnormal Cl2/BCL3 GaAs Etch

khu834 at snf.stanford.edu khu834 at snf.stanford.edu
Sat Oct 8 15:32:12 PDT 2011


The color of the plasma for 15sccm Ar2, 1.5sccm Cl2, 10sccm BCL3 usually appear green/ yellowish at 200W ECR. However, the plasma is bluish/white in color today.
The etched GaAs surface is very rough. This is perhaps just an isolated incident. All gas flow appear normal.
Will try another sample in a few days.




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