Comment pquest SNF 2011-10-10 15:17:35: Possible BCl3 leak or contamination

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Oct 14 14:35:53 PDT 2011


Pumped on the cylinder for about 15 minutes.  Ran a BCl3 plasma.  Coler seems more normal.




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