Comment pquest SNF 2011-10-14 14:38:42: Update BCl3
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Oct 14 14:38:43 PDT 2011
Pumped on the gas cylinder for about 15 minutes. Ran a BCl3 recipe. Now the color is a more normal greenish white. Needs a process qualification
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