Comment pquest SNF 2011-10-14 14:38:42: Update BCl3

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Oct 14 14:38:43 PDT 2011


Pumped on the gas cylinder for about 15 minutes.  Ran a BCl3 recipe.  Now the color is a more normal greenish white.  Needs a process qualification




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