Comment pquest SNF 2011-10-21 09:03:31: wet clean
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Fri Oct 21 09:03:31 PDT 2011
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Comment pquest SNF 2011-10-14 14:38:42: Update BCl3
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Shutdown pquest SNF 2011-10-22 18:39:13: Wafer broke inside chamber
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wet clean complete. He. flow 4.5
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Comment pquest SNF 2011-10-14 14:38:42: Update BCl3
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Shutdown pquest SNF 2011-10-22 18:39:13: Wafer broke inside chamber
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