Shutdown pquest SNF 2011-10-26 22:20:40: wafer in chamber - not sitting properly on holder

sgchong at snf.stanford.edu sgchong at snf.stanford.edu
Wed Oct 26 22:20:40 PDT 2011


The wafer is in the chamber, and it is not sitting properly on the holder.  I pressed ESC and left the tool there.




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