Shutdown pquest SNF 2011-10-26 22:20:40: wafer in chamber - not sitting properly on holder
sgchong at snf.stanford.edu
sgchong at snf.stanford.edu
Wed Oct 26 22:20:40 PDT 2011
The wafer is in the chamber, and it is not sitting properly on the holder. I pressed ESC and left the tool there.
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