Shutdown pquest SNF 2011-10-27 13:19:12: quartz wafer broken inside chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Oct 27 17:45:01 PDT 2011


Removed broken quartz wafer, one of the vesple lifter pin
broke and can't find a replacement lifter pin.  Removed the 
two other vesple lifter pins and installed three new teflon lifter
pins to replace the vesple pins. The teflon pins are only temporary
till we can make new vesple lifter pins. I wiped down the chamber
and ran 30mins O2 plasma.




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