October 2011 Archives by thread

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Starting: Wed Oct 5 11:08:30 PDT 2011
Ending: Fri Oct 28 14:31:42 PDT 2011
Messages: 24

• Problem pquest SNF 2011-09-27 10:04:55: BCl3 gas low   eenriquez at snf.stanford.edu
• Problem pquest SNF 2011-10-05 11:13:18: Needs a process qual   eenriquez at snf.stanford.edu
• Comment pquest SNF 2011-10-07 11:33:15: Wet Clean   cbaxter at snf.stanford.edu
• Comment pquest SNF 2011-10-08 15:32:11: Abnormal Cl2/BCL3 GaAs Etch   khu834 at snf.stanford.edu
• Comment pquest SNF 2011-10-10 15:17:35: Possible BCl3 leak or contamination   eenriquez at snf.stanford.edu
  • Comment pquest SNF 2011-10-10 15:17:35: Possible BCl3 leak or contamination   eenriquez at snf.stanford.edu
• Comment pquest SNF 2011-10-11 13:27:36: Update BCl3   eenriquez at snf.stanford.edu
  • Comment pquest SNF 2011-10-11 13:27:36: Update BCl3   eenriquez at snf.stanford.edu
• Problem pquest SNF 2011-10-12 14:57:08: Out of BCl3   armandhr at snf.stanford.edu
  • Problem pquest SNF 2011-10-12 14:57:08: Out of BCl3   eenriquez at snf.stanford.edu
• Comment pquest SNF 2011-10-14 14:38:42: Update BCl3   eenriquez at snf.stanford.edu
• Comment pquest SNF 2011-10-21 09:03:31: wet clean   mdickey at snf.stanford.edu
• Shutdown pquest SNF 2011-10-22 18:39:13: Wafer broke inside chamber   usha at snf.stanford.edu
  • Shutdown pquest SNF 2011-10-22 18:39:13: Wafer broke inside chamber   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2011-10-26 05:23:51: water   mdickey at snf.stanford.edu
  • Shutdown pquest SNF 2011-10-26 05:23:51: water   mdickey at snf.stanford.edu
• Problem pquest SNF 2011-10-26 17:55:46: Load lock hinge   justinwu at snf.stanford.edu
  • Problem pquest SNF 2011-10-26 17:55:46: Load lock hinge   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2011-10-26 22:20:40: wafer in chamber - not sitting properly on holder   sgchong at snf.stanford.edu
  • Shutdown pquest SNF 2011-10-26 22:20:40: wafer in chamber - not sitting properly on holder   mdickey at snf.stanford.edu
• Shutdown pquest SNF 2011-10-27 13:19:12: quartz wafer broken inside chamber   sgchong at snf.stanford.edu
  • Shutdown pquest SNF 2011-10-27 13:19:12: quartz wafer broken inside chamber   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2011-10-27 20:59:10: wafer stuck   zzp at snf.stanford.edu
  • Shutdown pquest SNF 2011-10-27 20:59:10: wafer stuck   mdickey at snf.stanford.edu

Last message date: Fri Oct 28 14:31:42 PDT 2011
Archived on: Fri Jan 11 13:09:56 PST 2013

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