From altamash at snf.stanford.edu Sun Sep 4 11:34:11 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sun, 4 Sep 2011 11:34:11 -0700 Subject: Problem pquest SNF 2011-09-04 11:34:10: MW power fluctuating Message-ID: Set at 200 but flutuates between 201 and 190. This is similar to what happened last year. Also Helium flow is lower than normal ( used to be ~7.5 now it is ~5.5 ) From altamash at snf.stanford.edu Sun Sep 4 11:39:34 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sun, 4 Sep 2011 11:39:34 -0700 Subject: Problem pquest SNF 2011-09-04 11:39:33: Clamp squeaking badly Message-ID: From cbaxter at snf.stanford.edu Sun Sep 4 20:43:41 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Sep 2011 20:43:41 -0700 Subject: Problem pquest SNF 2011-09-04 11:39:33: Clamp squeaking badly Message-ID: Lube clamp shaft.. From cbaxter at snf.stanford.edu Sun Sep 4 20:56:06 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Sep 2011 20:56:06 -0700 Subject: Problem pquest SNF 2011-09-04 11:34:10: MW power fluctuating Message-ID: I ran 30min o2 clean and was able tuned it right. Did encountered micorwave fluctuation.. From eenriquez at snf.stanford.edu Fri Sep 9 11:54:56 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Sep 2011 11:54:56 -0700 Subject: Comment pquest SNF 2011-08-25 18:12:20: Wet Clean Message-ID: Archived From eenriquez at snf.stanford.edu Thu Sep 22 13:19:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2011 13:19:07 -0700 Subject: Comment pquest SNF 2011-09-22 13:19:07: Broken wafer in the chamber. Message-ID: Recovered broken piece and ran O2 plasma. From eenriquez at snf.stanford.edu Fri Sep 23 10:21:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Sep 2011 10:21:41 -0700 Subject: Comment pquest SNF 2011-09-23 10:21:41: Completed wet clean. Message-ID: From eenriquez at snf.stanford.edu Fri Sep 23 10:21:48 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Sep 2011 10:21:48 -0700 Subject: Comment pquest SNF 2011-08-12 09:13:10: Completed the wet clean Message-ID: Archived From eenriquez at snf.stanford.edu Fri Sep 23 10:21:59 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Sep 2011 10:21:59 -0700 Subject: Comment pquest SNF 2011-09-22 13:19:07: Broken wafer in the chamber. Message-ID: Archived From latta at snf.stanford.edu Tue Sep 27 10:04:56 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 27 Sep 2011 10:04:56 -0700 Subject: Problem pquest SNF 2011-09-27 10:04:55: BCl3 gas low Message-ID: At this point there is still gas in the lines, but it will run out. Be sure to monitor your gas flows closely. A replacement cylinder has been ordered and should be here in a week. From khu834 at snf.stanford.edu Tue Sep 27 12:32:38 2011 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Tue, 27 Sep 2011 12:32:38 -0700 Subject: Comment pquest SNF 2011-09-27 12:32:38: ECR power fluctuating Message-ID: I also observed fluctuating ECR power between 190-200W when set to 200W. This occurred a year ago and was fixed earlier this year. However, it seemed the problem returned again.