From alsune at snf.stanford.edu Fri Apr 6 00:40:57 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 6 Apr 2012 00:40:57 -0700 Subject: Shutdown pquest SNF 2012-04-06 00:40:57: Arm is stuck Message-ID: While removing the wafer from inside the arm is mechanically stuck and made a rattling noise. Most likely the motor is stuck somehow. Turned of power sources. From eenriquez at snf.stanford.edu Fri Apr 6 09:25:31 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Apr 2012 09:25:31 -0700 Subject: Comment pquest SNF 2012-04-06 09:25:31: Update stuck arm problem Message-ID: The chain in the arm drive mechanism broke. Need to locate another chain. From zzp at snf.stanford.edu Fri Apr 6 13:05:21 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 6 Apr 2012 13:05:21 -0700 Subject: Problem pquest SNF 2012-04-06 13:05:20: ECR Microwave power lower than set value Message-ID: supposed to be 400 but only 240 and it didn't give etch though other readings right From mdickey at snf.stanford.edu Wed Apr 11 08:17:15 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 11 Apr 2012 08:17:15 -0700 Subject: Comment pquest SNF 2012-04-11 08:17:14: chain order Message-ID: A replacement chain is being ordered today. Should arrive tomorrow. From eenriquez at snf.stanford.edu Thu Apr 12 13:30:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Apr 2012 13:30:38 -0700 Subject: Shutdown pquest SNF 2012-04-06 00:40:57: Arm is stuck Message-ID: Replaced broken chain. From eenriquez at snf.stanford.edu Thu Apr 12 13:30:45 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Apr 2012 13:30:45 -0700 Subject: Comment pquest SNF 2012-04-06 09:25:31: Update stuck arm problem Message-ID: Replaced broken chain. From eenriquez at snf.stanford.edu Thu Apr 12 13:30:55 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Apr 2012 13:30:55 -0700 Subject: Comment pquest SNF 2012-04-11 08:17:14: chain order Message-ID: Archived From eenriquez at snf.stanford.edu Fri Apr 13 07:48:59 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Apr 2012 07:48:59 -0700 Subject: Problem pquest SNF 2012-04-06 13:05:20: ECR Microwave power lower than set value Message-ID: Reloaded the recipe (ZZpal) From xixie54 at snf.stanford.edu Sun Apr 15 19:31:08 2012 From: xixie54 at snf.stanford.edu (xixie54 at snf.stanford.edu) Date: Sun, 15 Apr 2012 19:31:08 -0700 Subject: Comment pquest SNF 2012-04-15 19:31:08: ECR only up to 240 Message-ID: in my recipe ECR is supposed to be 300, but the real ECR during process is only 240. I remember someone had reported this problem several days ago From xixie54 at snf.stanford.edu Sun Apr 15 19:36:53 2012 From: xixie54 at snf.stanford.edu (xixie54 at snf.stanford.edu) Date: Sun, 15 Apr 2012 19:36:53 -0700 Subject: Problem pquest SNF 2012-04-15 19:36:52: ECR only up to 240 Message-ID: in my recipe ECR is supposed to be 300, but the real ECR during process is only 240. I remember someone had reported this problem several days ago From eenriquez at snf.stanford.edu Mon Apr 16 09:02:36 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Apr 2012 09:02:36 -0700 Subject: Comment pquest SNF 2012-04-16 09:02:35: Update ECR power problem Message-ID: I ran 4 different recipes but was unable to duplicate the problem. We will continue to monitor the problem. Please note the recipe that you ran next time the problem occurs. From alsune at snf.stanford.edu Fri Apr 20 01:57:18 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 20 Apr 2012 01:57:18 -0700 Subject: Shutdown pquest SNF 2012-04-20 01:57:17: Wafer dropped inside the chamber Message-ID: After oxygen clean. ran user recipe for 10min. But the wafer was lost during unloading. Sorry for the inconvienence. From mdickey at snf.stanford.edu Fri Apr 20 08:46:57 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 20 Apr 2012 08:46:57 -0700 Subject: Shutdown pquest SNF 2012-04-20 01:57:17: Wafer dropped inside the chamber Message-ID: Recovered dropped wafers and performed O3 clean. Checked wafer loading and had no problems. From kavehm at snf.stanford.edu Fri Apr 20 11:17:43 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Fri, 20 Apr 2012 11:17:43 -0700 Subject: Problem pquest SNF 2012-04-20 11:17:42: system issues Message-ID: Having problems with two previously working recipes: 1. Polyimid Plasma is not stable, can see signs of arcing. 2. Durimid Low pressure version of Polyimid. The plasma will not spark at all, and the chamber is not able to achieve the low pressure it previously was before. Previously went down to 1.1 mTorr, now will not go below 1.7 mTorr with gate valve fully open. Chamber was cleaned with 2x 15min Oxygen3 runs prior to running above recipes. Both recipes were ran with new Si test wafers. From eenriquez at snf.stanford.edu Fri Apr 20 11:45:12 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Apr 2012 11:45:12 -0700 Subject: Problem pquest SNF 2012-04-15 19:36:52: ECR only up to 240 Message-ID: Have not been able to duplicate this problem. From cbaxter at snf.stanford.edu Sun Apr 22 20:50:22 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 Apr 2012 20:50:22 -0700 Subject: Problem pquest SNF 2012-04-20 11:17:42: system issues Message-ID: Ran the same recipes as previous user and was able to strike plasma w/out problem. I ran a 30 mins clean plasma. From xixie54 at snf.stanford.edu Mon Apr 23 20:16:24 2012 From: xixie54 at snf.stanford.edu (xixie54 at snf.stanford.edu) Date: Mon, 23 Apr 2012 20:16:24 -0700 Subject: Problem pquest SNF 2012-04-23 20:16:23: ECR reading not stable Message-ID: ECR reading not stable. I use 300W but the reading is fluctuating bewteen 288-298. while refective is 0. From eenriquez at snf.stanford.edu Wed Apr 25 08:28:34 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Apr 2012 08:28:34 -0700 Subject: Problem pquest SNF 2012-04-23 20:16:23: ECR reading not stable Message-ID: Adjusted the "power set" knob on the power supply from 11.20 to 10.15. The power reading becomes unstable when the knob is set at the end of its physical limit. From ntayebi at snf.stanford.edu Wed Apr 25 13:32:47 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Wed, 25 Apr 2012 13:32:47 -0700 Subject: Shutdown pquest SNF 2012-04-25 13:32:47: wafer broke and no ECR power Message-ID: There was no ECR power when I started the actual etch after the O clean. When I tried to unload my wafer it broke. Need to use the tool ASAP as I need to finish process by eow. Noureddine From eenriquez at snf.stanford.edu Wed Apr 25 17:15:23 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Apr 2012 17:15:23 -0700 Subject: Shutdown pquest SNF 2012-04-25 13:32:47: wafer broke and no ECR power Message-ID: Cleaned the chamber and cycled wafers. From eenriquez at snf.stanford.edu Wed Apr 25 17:45:26 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Apr 2012 17:45:26 -0700 Subject: Problem pquest SNF 2012-04-25 17:45:26: Microwave generator problem Message-ID: The generator "overload" light turns on when the setpoint exceeds 600 watts (max is 700 w). We are looking for a replacement generator. From eenriquez at snf.stanford.edu Fri Apr 27 11:11:35 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Apr 2012 11:11:35 -0700 Subject: Comment pquest SNF 2012-04-27 11:11:34: Update microwave generator Message-ID: We have a work around for the microwave generator problem of the microwave over loading when running at a power level greater than 600W. If you put a "microwave turn on step" right before the main etch step of your recipe, the generator will not over load even at maximum setpoint. For example, I created a step before the main etch of 10 W microwave power for 10 sec. The main etch step was set at 700 W (maximum) and the generator ran without a problem.