Shutdown pquest SNF 2012-04-20 01:57:17: Wafer dropped inside the chamber

alsune at snf.stanford.edu alsune at snf.stanford.edu
Fri Apr 20 01:57:18 PDT 2012

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After oxygen clean. ran user recipe for 10min. But the wafer was lost during unloading. Sorry for the inconvienence.

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