Shutdown pquest SNF 2012-04-20 01:57:17: Wafer dropped inside the chamber
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Fri Apr 20 08:46:57 PDT 2012
Recovered dropped wafers and performed O3 clean. Checked wafer
loading and had no problems.
More information about the pquest-pcs
mailing list