Problem pquest SNF 2012-04-20 11:17:42: system issues

kavehm at snf.stanford.edu kavehm at snf.stanford.edu
Fri Apr 20 11:17:43 PDT 2012


Having problems with two previously working recipes:
1. Polyimid
Plasma is not stable, can see signs of arcing.
2. Durimid
Low pressure version of Polyimid. The plasma will not spark at all, and the chamber is not able to achieve the low pressure it previously was before. Previously went down to 1.1 mTorr, now will not go below 1.7 mTorr with gate valve fully open.
Chamber was cleaned with 2x 15min Oxygen3 runs prior to running above recipes. Both recipes were ran with new Si test wafers.




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