Shutdown pquest SNF 2012-04-25 13:32:47: wafer broke and no ECR power

ntayebi at ntayebi at
Wed Apr 25 13:32:47 PDT 2012

There was no ECR power when I started the actual etch after the O clean. When I tried to unload my wafer it broke.  Need to use the tool ASAP as I need to finish process by eow.

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