Comment pquest SNF 2012-04-27 11:11:34: Update microwave generator

eenriquez at eenriquez at
Fri Apr 27 11:11:35 PDT 2012

We have a work around for the microwave generator problem of the microwave over loading when running at a power level greater than 600W.  If you put a "microwave turn on step" right before the main etch step of your recipe, the generator will not over load even at maximum setpoint.  For example, I created a step before the main etch of 10 W microwave power for 10 sec.  The main etch step was set at 700 W (maximum) and the generator ran without a problem.

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