Problem pquest SNF 2012-08-02 12:56:07: DC Bias and backside

kavehm at snf.stanford.edu kavehm at snf.stanford.edu
Thu Aug 2 12:56:07 PDT 2012


Ran two sets of etches, first set using durimid recipe went fine. Had problems during second set using gratan1 recipe.
Backside He shot up to to 18.1 sccm when etch started and dc bias was about 1/3 of typical value.




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