From cbaxter at snf.stanford.edu Sun Jul 1 20:20:44 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 1 Jul 2012 20:20:44 -0700 Subject: Shutdown pquest SNF 2012-06-28 22:57:31: Wafer stuck inside the chamber Message-ID: Removed broken wafer and verified wafer handoff from load arm to chamber. From faridz at snf.stanford.edu Mon Jul 2 11:20:35 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Mon, 2 Jul 2012 11:20:35 -0700 Subject: Shutdown pquest SNF 2012-07-02 11:20:35: wafer stuck uinside the chamber Message-ID: wafer stuck inside the chamber after etch process. End point detector laptop screen also not working. From cbaxter at snf.stanford.edu Mon Jul 2 13:40:11 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 2 Jul 2012 13:40:11 -0700 Subject: Shutdown pquest SNF 2012-07-02 11:20:35: wafer stuck uinside the chamber Message-ID: Recovered the wafer inside the chamber and adjusted the center vesple lifter pin, also tighten the set screw that hold the lifter vesple pin. The pc and laser are working fine after I rebooted the pc... From eenriquez at snf.stanford.edu Tue Jul 3 12:46:04 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 12:46:04 -0700 Subject: Problem pquest SNF 2012-04-25 17:45:26: Microwave generator problem Message-ID: Please modify your recipe to include a low power (1 watt) microwave setpoint before the main etch step. From eenriquez at snf.stanford.edu Tue Jul 3 12:46:27 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 12:46:27 -0700 Subject: Problem pquest SNF 2012-06-27 13:46:36: BCl3 down Message-ID: BCl3 is now available. From wshuang at snf.stanford.edu Sun Jul 8 11:17:45 2012 From: wshuang at snf.stanford.edu (wshuang at snf.stanford.edu) Date: Sun, 8 Jul 2012 11:17:45 -0700 Subject: Problem pquest SNF 2012-07-08 11:17:44: backside He flow is 5.4sccm Message-ID: From cbaxter at snf.stanford.edu Sun Jul 8 15:08:22 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Jul 2012 15:08:22 -0700 Subject: Problem pquest SNF 2012-07-08 11:17:44: backside He flow is 5.4sccm Message-ID: Vented chamber and cleaned chuck o-ring.. From kavehm at snf.stanford.edu Mon Jul 9 12:18:26 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Mon, 9 Jul 2012 12:18:26 -0700 Subject: Problem pquest SNF 2012-07-09 12:18:26: RF Generator Message-ID: RF Generator not working. No applied bias, tried different recipes/wafers. From wshuang at snf.stanford.edu Mon Jul 9 22:12:25 2012 From: wshuang at snf.stanford.edu (wshuang at snf.stanford.edu) Date: Mon, 9 Jul 2012 22:12:25 -0700 Subject: Problem pquest SNF 2012-07-09 22:12:24: RF generator Message-ID: I set the RF power to 70w, but the actual value is around 7w, which is far below the setpoint. From eenriquez at snf.stanford.edu Tue Jul 10 07:08:20 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:08:20 -0700 Subject: Shutdown pquest SNF 2012-07-10 07:08:20: RF generator problem Message-ID: No power output. From cbaxter at snf.stanford.edu Tue Jul 10 09:54:23 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Jul 2012 09:54:23 -0700 Subject: Comment pquest SNF 2012-07-10 09:54:22: Update Message-ID: The RF generator is good, problem is on the RF rmatch. Will continue to troubleshoot... From eenriquez at snf.stanford.edu Wed Jul 11 18:29:49 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2012 18:29:49 -0700 Subject: Comment pquest SNF 2012-07-11 18:29:49: Update RF generator Message-ID: Found the resistance of the matching network's rf input capacitor to ground was about 250 Kohm. The cause of the low resistance (should be several meg ohms) is the process cooling water. I installed a chiller to test the RF using DI water. Ran the O3 recipe several times without problem. I will need to verify if the chiller was the actual fix to the problem. From eenriquez at snf.stanford.edu Thu Jul 12 13:45:50 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2012 13:45:50 -0700 Subject: Shutdown pquest SNF 2012-07-10 07:08:20: RF generator problem Message-ID: Cleaned up RF matching network cooling lines. Adjusted matching network. From eenriquez at snf.stanford.edu Thu Jul 12 13:46:45 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2012 13:46:45 -0700 Subject: Problem pquest SNF 2012-07-09 12:18:26: RF Generator Message-ID: Cleaned up RF matching network cooling lines. Adjusted matching network. From eenriquez at snf.stanford.edu Thu Jul 12 13:46:50 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2012 13:46:50 -0700 Subject: Problem pquest SNF 2012-07-09 22:12:24: RF generator Message-ID: Cleaned up RF matching network cooling lines. Adjusted matching network. From eenriquez at snf.stanford.edu Thu Jul 12 13:46:56 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2012 13:46:56 -0700 Subject: Problem pquest SNF 2012-07-10 01:18:32: RF Generator Message-ID: Cleaned up RF matching network cooling lines. Adjusted matching network. From eenriquez at snf.stanford.edu Thu Jul 12 13:47:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2012 13:47:05 -0700 Subject: Comment pquest SNF 2012-07-10 09:54:22: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 12 13:47:11 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2012 13:47:11 -0700 Subject: Comment pquest SNF 2012-07-11 18:29:49: Update RF generator Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jul 12 13:47:37 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2012 13:47:37 -0700 Subject: Comment pquest SNF 2012-06-28 11:48:46: Turbo Down + Restarted Message-ID: Archived From janp at snf.stanford.edu Thu Jul 12 15:59:37 2012 From: janp at snf.stanford.edu (janp at snf.stanford.edu) Date: Thu, 12 Jul 2012 15:59:37 -0700 Subject: Problem pquest SNF 2012-07-12 15:59:36: Heater not working Message-ID: Set heater to 185 C, switched to gas cooling, temperature reading is around 20 C after 1 hour. (Switched back to water cooling now.) From eenriquez at snf.stanford.edu Fri Jul 13 08:15:09 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jul 2012 08:15:09 -0700 Subject: Problem pquest SNF 2012-07-12 15:59:36: Heater not working Message-ID: Reset the heater circuit breaker From derickson at snf.stanford.edu Fri Jul 13 10:51:47 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Fri, 13 Jul 2012 10:51:47 -0700 Subject: Problem pquest SNF 2012-07-13 10:51:46: Very unstable power Message-ID: Tried to process wafers but the forward power is very unstable. From eenriquez at snf.stanford.edu Fri Jul 13 14:34:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jul 2012 14:34:05 -0700 Subject: Problem pquest SNF 2012-07-13 10:51:46: Very unstable power Message-ID: Recipe problem. User is trying to run a recipe @ too low of a pressure. From mdickey at snf.stanford.edu Tue Jul 17 06:50:55 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 17 Jul 2012 06:50:55 -0700 Subject: Problem pquest SNF 2012-07-17 06:50:55: CL2 Message-ID: Problem with CL2 delivery. Run no Chlorine at this time From mdickey at snf.stanford.edu Tue Jul 17 08:54:19 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 17 Jul 2012 08:54:19 -0700 Subject: Problem pquest SNF 2012-07-17 06:50:55: CL2 Message-ID: CL2 back on line From kgc at snf.stanford.edu Tue Jul 17 21:17:55 2012 From: kgc at snf.stanford.edu (kgc at snf.stanford.edu) Date: Tue, 17 Jul 2012 21:17:55 -0700 Subject: Problem pquest SNF 2012-07-17 21:17:55: Microwave reflected power keeps spiking up Message-ID: On new dummy wafer, using a Cl/O2 recipe, the reflected power of the microwave kept spiking up. I would tune it down to 0 and then a second later it would jump up to 50. From chienyuc at snf.stanford.edu Tue Jul 17 22:49:25 2012 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Tue, 17 Jul 2012 22:49:25 -0700 Subject: Shutdown pquest SNF 2012-07-17 22:49:24: Chiller Fault Message-ID: During the process my chunk temperature was set to 70C, and the chiller turned to red light (fault). Stopped my process immediately but the chunk temperature raised up to 90C since there's no water cooling. From mdickey at snf.stanford.edu Thu Jul 19 08:51:15 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Jul 2012 08:51:15 -0700 Subject: Shutdown pquest SNF 2012-07-17 22:49:24: Chiller Fault Message-ID: reset thermal switch From kgc at snf.stanford.edu Thu Jul 19 13:59:55 2012 From: kgc at snf.stanford.edu (kgc at snf.stanford.edu) Date: Thu, 19 Jul 2012 13:59:55 -0700 Subject: Problem pquest SNF 2012-07-19 13:59:54: Microwave power still unsteady Message-ID: From wshuang at snf.stanford.edu Sat Jul 21 21:49:47 2012 From: wshuang at snf.stanford.edu (wshuang at snf.stanford.edu) Date: Sat, 21 Jul 2012 21:49:47 -0700 Subject: Shutdown pquest SNF 2012-07-21 21:49:47: Wafer broke in the chamber Message-ID: Sorry labmembers, my wafer was broken in the chamber, I have to shut dowm the machine. From cbaxter at snf.stanford.edu Sun Jul 22 19:40:20 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 Jul 2012 19:40:20 -0700 Subject: Shutdown pquest SNF 2012-07-21 21:49:47: Wafer broke in the chamber Message-ID: Vented chamber and vacuum broken wafer chip. Found vesple lifter pin (5 o'clock was loose), secured vesple lifter pin and ran O2 clean plasma. From vijayn at snf.stanford.edu Mon Jul 23 10:07:22 2012 From: vijayn at snf.stanford.edu (vijayn at snf.stanford.edu) Date: Mon, 23 Jul 2012 10:07:22 -0700 Subject: Comment pquest SNF 2012-07-23 10:07:22: Software Issue Message-ID: GUI on run screen missing underlay of chamber diagram. From bajcsy at snf.stanford.edu Mon Jul 23 18:31:18 2012 From: bajcsy at snf.stanford.edu (bajcsy at snf.stanford.edu) Date: Mon, 23 Jul 2012 18:31:18 -0700 Subject: Problem pquest SNF 2012-07-23 18:31:17: microwave reflection problem Message-ID: could not reduce the microwave reflection to less then 10% of the forward power From popomoo at snf.stanford.edu Mon Jul 23 22:31:13 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Mon, 23 Jul 2012 22:31:13 -0700 Subject: Comment pquest SNF 2012-07-23 22:31:12: Microwave reflection less than 5% Message-ID: The two knobs for tuning the microwave were way off from the normal points. Now, it works fine. From mdickey at snf.stanford.edu Wed Jul 25 09:08:03 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 25 Jul 2012 09:08:03 -0700 Subject: Comment pquest SNF 2012-07-25 09:08:02: Tested Message-ID: Ran the last user's recipe "Shumoo" and ran without problems. Elmer centered the RF tuning From eenriquez at snf.stanford.edu Wed Jul 25 11:21:53 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:21:53 -0700 Subject: Problem pquest SNF 2012-07-17 21:17:55: Microwave reflected power keeps spiking up Message-ID: Recentered microwave tuning potentiometer. Ran various recipes including the user's recipe with no problems. Microwave tuning was very stable. From eenriquez at snf.stanford.edu Wed Jul 25 11:22:02 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:22:02 -0700 Subject: Problem pquest SNF 2012-07-19 13:59:54: Microwave power still unsteady Message-ID: Recentered microwave tuning potentiometer. Ran various recipes including the user's recipe with no problems. Microwave tuning was very stable. From eenriquez at snf.stanford.edu Wed Jul 25 11:22:09 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:22:09 -0700 Subject: Problem pquest SNF 2012-07-23 18:31:17: microwave reflection problem Message-ID: Recentered microwave tuning potentiometer. Ran various recipes including the user's recipe with no problems. Microwave tuning was very stable. From eenriquez at snf.stanford.edu Wed Jul 25 11:22:16 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:22:16 -0700 Subject: Comment pquest SNF 2012-07-25 09:08:02: Tested Message-ID: archived From eenriquez at snf.stanford.edu Wed Jul 25 11:22:21 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:22:21 -0700 Subject: Comment pquest SNF 2012-07-23 22:31:12: Microwave reflection less than 5% Message-ID: Recentered microwave tuning potentiometer. Ran various recipes including the user's recipe with no problems. Microwave tuning was very stable. From mtang at snf.stanford.edu Thu Jul 26 20:15:35 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 26 Jul 2012 20:15:35 -0700 Subject: Comment pquest SNF 2012-07-26 20:15:35: Fluorine time extended to Monday Message-ID: Due to popular request (and no negative votes) fluorine time is extended to Monday. The chamber clean normally scheduled for Friday morning is now postponed to Monday. From kyunglok at snf.stanford.edu Sat Jul 28 21:17:18 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sat, 28 Jul 2012 21:17:18 -0700 Subject: Shutdown pquest SNF 2012-07-28 21:17:17: One finger lost my wafer inside the chamber Message-ID: Sorry for the other users. Fortunately, the wafer wasn't broken. It tilted due to the lost of one of its support fingers. From cbaxter at snf.stanford.edu Sun Jul 29 19:55:19 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 29 Jul 2012 19:55:19 -0700 Subject: Shutdown pquest SNF 2012-07-28 21:17:17: One finger lost my wafer inside the chamber Message-ID: Lifter vesple pin not missing, wafer was misloaded. Recovered wafer and wiped down chamber with ipa. Ran 30mins O2 clean.. From mdickey at snf.stanford.edu Mon Jul 30 08:05:01 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 30 Jul 2012 08:05:01 -0700 Subject: Comment pquest SNF 2012-07-30 08:05:01: wet clean Message-ID: Completed wet clean From jaehlee at snf.stanford.edu Tue Jul 31 14:47:21 2012 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Tue, 31 Jul 2012 14:47:21 -0700 Subject: Comment pquest SNF 2012-07-31 14:47:21: pen holder is a through hole now... Message-ID: it might have broken between yesterday and today.