From mdickey at snf.stanford.edu Fri Jun 1 10:28:09 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 1 Jun 2012 10:28:09 -0700 Subject: Comment pquest SNF 2012-06-01 10:28:08: wet clean Message-ID: Completed wet clean and replaced springs From eenriquez at snf.stanford.edu Mon Jun 4 07:05:40 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Jun 2012 07:05:40 -0700 Subject: Comment pquest SNF 2012-05-18 09:44:42: wet clean Message-ID: archived From eenriquez at snf.stanford.edu Mon Jun 4 07:05:53 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Jun 2012 07:05:53 -0700 Subject: Comment pquest SNF 2012-03-29 12:29:57: can't find log book? Message-ID: archived From armandhr at snf.stanford.edu Tue Jun 5 17:10:56 2012 From: armandhr at snf.stanford.edu (armandhr at snf.stanford.edu) Date: Tue, 5 Jun 2012 17:10:56 -0700 Subject: Comment pquest SNF 2012-06-05 17:10:56: Need more logsheets Message-ID: All logsheets have been filled. From hongyuc at snf.stanford.edu Tue Jun 5 23:21:06 2012 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Tue, 5 Jun 2012 23:21:06 -0700 Subject: Shutdown pquest SNF 2012-06-05 23:21:06: the dummy stuck inside... Message-ID: From eenriquez at snf.stanford.edu Wed Jun 6 08:03:35 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Jun 2012 08:03:35 -0700 Subject: Shutdown pquest SNF 2012-06-05 23:21:06: the dummy stuck inside... Message-ID: Recovered the wafer, verified wafer handling, relubricated the lift lead screw. Cycled wafers and ran O2 plasma. From cbaxter at snf.stanford.edu Sun Jun 10 15:13:59 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 10 Jun 2012 15:13:59 -0700 Subject: Shutdown pquest SNF 2012-06-10 00:11:33: Dummy wafer broken inside the chamber. Message-ID: Vented chamber and removed broken wafer chips. Wiped down chamber with ipa and ran 30mins O2 clean plasma. From wslee at snf.stanford.edu Mon Jun 11 17:15:44 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Mon, 11 Jun 2012 17:15:44 -0700 Subject: Comment pquest SNF 2012-06-11 17:15:44: still out of logsheets Message-ID: From wslee at snf.stanford.edu Mon Jun 11 17:22:15 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Mon, 11 Jun 2012 17:22:15 -0700 Subject: Shutdown pquest SNF 2012-06-11 17:22:14: wafer stuck inside Message-ID: My wafer is stuck to the top clamps inside the chamber, which makes it hard to see. You can still see the red ring so the chamber appears empty. Please unload in the case that is on top of the load lock. From mdickey at snf.stanford.edu Tue Jun 12 08:17:29 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 12 Jun 2012 08:17:29 -0700 Subject: Shutdown pquest SNF 2012-06-11 17:22:14: wafer stuck inside Message-ID: recovered users wafer and tested load/unload of wafers From haiwei at snf.stanford.edu Tue Jun 12 21:46:33 2012 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Tue, 12 Jun 2012 21:46:33 -0700 Subject: Shutdown pquest SNF 2012-06-12 21:46:33: wafer stuck inside the chamber Message-ID: Pins didn't lift the dummy wafer up completely. The wafer might have been broken inside the chamber. From eenriquez at snf.stanford.edu Wed Jun 13 07:45:24 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Jun 2012 07:45:24 -0700 Subject: Comment pquest SNF 2012-06-13 07:45:23: Update broken wafer Message-ID: Cleaned the chamber and replaced the teflon clamp insert (one of the pads was heavily eroded). Now testing wafer handling. We will perform a more extensive reliability check before we release it to the users. From mdickey at snf.stanford.edu Wed Jun 13 10:19:46 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Jun 2012 10:19:46 -0700 Subject: Shutdown pquest SNF 2012-06-12 21:46:33: wafer stuck inside the chamber Message-ID: Retrieved broken wafer and ran 10 O3 cleean recipes with no problems From eenriquez at snf.stanford.edu Thu Jun 14 07:38:42 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jun 2012 07:38:42 -0700 Subject: Comment pquest SNF 2012-06-13 07:45:23: Update broken wafer Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jun 14 07:39:20 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jun 2012 07:39:20 -0700 Subject: Comment pquest SNF 2012-06-11 17:15:44: still out of logsheets Message-ID: Log sheets now available. From eenriquez at snf.stanford.edu Thu Jun 14 07:39:26 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jun 2012 07:39:26 -0700 Subject: Comment pquest SNF 2012-06-05 17:10:56: Need more logsheets Message-ID: Log sheets now available. From eenriquez at snf.stanford.edu Thu Jun 14 07:39:35 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jun 2012 07:39:35 -0700 Subject: Comment pquest SNF 2012-05-31 18:08:19: Out of log sheets Message-ID: Log sheets now available. From mdickey at snf.stanford.edu Fri Jun 15 10:04:26 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 15 Jun 2012 10:04:26 -0700 Subject: Comment pquest SNF 2012-06-15 10:04:25: wet clean Message-ID: Performed wet clean and replaced springs From eenriquez at snf.stanford.edu Mon Jun 18 07:09:40 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Jun 2012 07:09:40 -0700 Subject: Comment pquest SNF 2012-06-01 10:28:08: wet clean Message-ID: archived From wshuang at snf.stanford.edu Thu Jun 21 20:59:38 2012 From: wshuang at snf.stanford.edu (wshuang at snf.stanford.edu) Date: Thu, 21 Jun 2012 20:59:38 -0700 Subject: Problem pquest SNF 2012-06-21 20:59:38: The chiller temperature was set to -46C Message-ID: When I was checking the Pquest before I start to etch my samples, I found the chiller termperature was set to -46C, which is way lower than the minimum value allowed. The actually temperature shown is 0.7C. I guess it has been running for a while, which may damage the chiller From mdickey at snf.stanford.edu Mon Jun 25 06:58:50 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 25 Jun 2012 06:58:50 -0700 Subject: Problem pquest SNF 2012-06-21 20:59:38: The chiller temperature was set to -46C Message-ID: Chiller has been topped off and is running at normal temp. From latta at snf.stanford.edu Wed Jun 27 13:46:37 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Jun 2012 13:46:37 -0700 Subject: Problem pquest SNF 2012-06-27 13:46:36: BCl3 down Message-ID: Will update. From mdickey at snf.stanford.edu Thu Jun 28 07:49:49 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 28 Jun 2012 07:49:49 -0700 Subject: Shutdown pquest SNF 2012-06-26 17:16:13: Wafer tilted inside Message-ID: Wafer broke. Vacuumed up broken pieces and ran O3 clean and loaded and unloaded without problems. Recovered users wafer piece that was on the carrier wafer From vijayn at snf.stanford.edu Thu Jun 28 11:48:47 2012 From: vijayn at snf.stanford.edu (vijayn at snf.stanford.edu) Date: Thu, 28 Jun 2012 11:48:47 -0700 Subject: Comment pquest SNF 2012-06-28 11:48:46: Turbo Down + Restarted Message-ID: Turbo went down. Chamber pressure = 90mTorr. Jim K. restarted it - current now around 2-3A. Watch pressure as you start your runs and look out for red error light on Turbo Controller.