Shutdown pquest SNF 2012-06-05 23:21:06: the dummy stuck inside...

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 6 08:03:35 PDT 2012


Recovered the wafer, verified wafer handling, relubricated the lift lead screw.  Cycled wafers and ran O2 plasma.




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