Shutdown pquest SNF 2012-06-10 00:11:33: Dummy wafer broken inside the chamber.

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Jun 10 15:13:59 PDT 2012


Vented chamber and removed broken wafer chips. Wiped
down chamber with ipa and ran 30mins O2 clean plasma.




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