Shutdown pquest SNF 2012-06-11 17:22:14: wafer stuck inside

wslee at snf.stanford.edu wslee at snf.stanford.edu
Mon Jun 11 17:22:15 PDT 2012


My wafer is stuck to the top clamps inside the chamber, which makes it hard to see. You can still see the red ring so the chamber appears empty.
Please unload in the case that is on top of the load lock.




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