Comment pquest SNF 2012-06-13 07:45:23: Update broken wafer

eenriquez at eenriquez at
Wed Jun 13 07:45:24 PDT 2012

Cleaned the chamber and replaced the teflon clamp insert (one of the pads was heavily eroded).  Now testing wafer handling.  We will perform a more extensive reliability check before we release it to the users.

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