Shutdown pquest SNF 2012-06-26 17:16:13: Wafer tilted inside

mdickey at snf.stanford.edu mdickey at snf.stanford.edu
Thu Jun 28 07:49:49 PDT 2012


Wafer broke. Vacuumed up broken pieces and ran O3 clean and loaded
and unloaded without problems. Recovered users wafer piece that
was on the carrier wafer




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