Comment pquest SNF 2012-06-28 11:48:46: Turbo Down + Restarted

vijayn at snf.stanford.edu vijayn at snf.stanford.edu
Thu Jun 28 11:48:47 PDT 2012

Previous message: Shutdown pquest SNF 2012-06-26 17:16:13: Wafer tilted inside
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Turbo went down.  Chamber pressure = 90mTorr.  Jim K. restarted it - current now around 2-3A.  Watch pressure as you start your runs and look out for red error light on Turbo Controller.

Previous message: Shutdown pquest SNF 2012-06-26 17:16:13: Wafer tilted inside
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