From mdickey at snf.stanford.edu Mon Mar 5 08:58:54 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 5 Mar 2012 08:58:54 -0800 Subject: Shutdown pquest SNF 2012-03-05 08:58:53: water Message-ID: process cooling water is down From mtang at snf.stanford.edu Mon Mar 5 14:16:45 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 5 Mar 2012 14:16:45 -0800 Subject: Shutdown pquest SNF 2012-03-05 08:58:53: water Message-ID: From eenriquez at snf.stanford.edu Wed Mar 7 13:29:27 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 Mar 2012 13:29:27 -0800 Subject: Comment pquest SNF 2012-03-07 13:29:27: BCl3 update Message-ID: BCl3 should be availabe by 3/12. Its possible it might be ready by 3/9 depending on the permit inspections. From usha at snf.stanford.edu Mon Mar 12 10:03:25 2012 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Mon, 12 Mar 2012 10:03:25 -0700 Subject: Shutdown pquest SNF 2012-03-12 10:03:25: Broke wafer Message-ID: From mdickey at snf.stanford.edu Mon Mar 12 11:57:06 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 12 Mar 2012 11:57:06 -0700 Subject: Comment pquest SNF 2012-03-12 11:57:05: wafer broken Message-ID: Removed broken wafer pieces, running O3 clean From eenriquez at snf.stanford.edu Mon Mar 12 14:31:25 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2012 14:31:25 -0700 Subject: Shutdown pquest SNF 2012-03-12 10:03:25: Broke wafer Message-ID: Mike cleaned the chamber and ran an O2 plasma. Cycled wafer handling several times with no problems. From eenriquez at snf.stanford.edu Mon Mar 12 14:31:59 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2012 14:31:59 -0700 Subject: Comment pquest SNF 2012-03-12 11:57:05: wafer broken Message-ID: Archived From eenriquez at snf.stanford.edu Mon Mar 12 14:34:50 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2012 14:34:50 -0700 Subject: Comment pquest SNF 2012-03-12 14:34:49: Update BCl3 Message-ID: Cylinder has been installed and the gas panel leak checked. Line heater is not turning due to an RTD error. Need to troubleshoot. From wslee at snf.stanford.edu Tue Mar 13 13:50:25 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 13 Mar 2012 13:50:25 -0700 Subject: Problem pquest SNF 2012-03-13 13:50:25: hinge broken Message-ID: The left hinge broke off when I closed the door. From eenriquez at snf.stanford.edu Tue Mar 13 14:33:55 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Mar 2012 14:33:55 -0700 Subject: Shutdown pquest SNF 2012-03-13 14:33:54: Lid hinge is broken Message-ID: From cbaxter at snf.stanford.edu Tue Mar 13 15:50:36 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 13 Mar 2012 15:50:36 -0700 Subject: Comment pquest SNF 2012-03-13 15:50:35: Door Hinge Message-ID: Ordering helocoil rebuild kit to repair door hinge. From shott at snf.stanford.edu Wed Mar 14 06:51:46 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 14 Mar 2012 06:51:46 -0700 Subject: Problem pquest SNF 2012-03-14 06:51:46: No chlorine available ... Message-ID: Chlorine and hydrogen bromide are unavailable while an emergency replacement of the exhaust duct happens in the corrosive gas vault. These gases should be available by Thursday at noon. John From shott at snf.stanford.edu Wed Mar 14 07:03:56 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 14 Mar 2012 07:03:56 -0700 Subject: Problem pquest SNF 2012-03-14 06:51:46: No chlorine available ... Message-ID: This work cannot be done today because Decon crew were stranded with truck problems. It will be rescheduled for early next week. John From eenriquez at snf.stanford.edu Wed Mar 14 09:28:53 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Mar 2012 09:28:53 -0700 Subject: Shutdown pquest SNF 2012-03-13 14:33:54: Lid hinge is broken Message-ID: Repaired broken lid hinge. From eenriquez at snf.stanford.edu Wed Mar 14 09:29:04 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Mar 2012 09:29:04 -0700 Subject: Comment pquest SNF 2012-03-13 15:50:35: Door Hinge Message-ID: Archived From eenriquez at snf.stanford.edu Wed Mar 14 09:29:19 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Mar 2012 09:29:19 -0700 Subject: Problem pquest SNF 2012-03-13 13:50:25: hinge broken Message-ID: Repaired broken hinge From eenriquez at snf.stanford.edu Wed Mar 14 09:31:12 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Mar 2012 09:31:12 -0700 Subject: Problem pquest SNF 2012-03-14 09:31:11: Chiller is not cooling. Message-ID: Will replace the chiller today. From eenriquez at snf.stanford.edu Wed Mar 14 16:23:40 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Mar 2012 16:23:40 -0700 Subject: Problem pquest SNF 2012-03-14 09:31:11: Chiller is not cooling. Message-ID: Replaced the chiller. New chiller is on the right side of the system. From eenriquez at snf.stanford.edu Wed Mar 14 16:25:28 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Mar 2012 16:25:28 -0700 Subject: Comment pquest SNF 2012-03-14 16:25:28: Update BCl3 Message-ID: Turned on BCl3 without the line heater. I will release the system by 9am tomorrow if the BCl3 flow remains stable. From mzhang2 at snf.stanford.edu Wed Mar 14 18:01:50 2012 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Wed, 14 Mar 2012 18:01:50 -0700 Subject: Shutdown pquest SNF 2012-03-14 18:01:49: no plasma Message-ID: ECR power is less than half of the set value, there is no color in the chamber when the power is on. test wafer thickness calibration also shows that there is no etching on the resist. From cbaxter at snf.stanford.edu Wed Mar 14 18:50:53 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Mar 2012 18:50:53 -0700 Subject: Shutdown pquest SNF 2012-03-14 18:01:49: no plasma Message-ID: Ran clean recipe and checked and verified plasma is stable. Please when putting the tool on shutdown right down the recipe's that has problem with striking plasma. From eenriquez at snf.stanford.edu Thu Mar 15 09:05:40 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Mar 2012 09:05:40 -0700 Subject: Problem pquest SNF 2012-02-14 15:01:06: Cl2 and BCl3 are not available Message-ID: Cl2 and BCl3 is now available. From eenriquez at snf.stanford.edu Thu Mar 15 09:05:55 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Mar 2012 09:05:55 -0700 Subject: Problem pquest SNF 2012-02-24 11:30:20: Cl2/BCl3 update Message-ID: BCl3 is now available. From eenriquez at snf.stanford.edu Thu Mar 15 09:06:07 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Mar 2012 09:06:07 -0700 Subject: Comment pquest SNF 2012-03-14 16:25:28: Update BCl3 Message-ID: archived From eenriquez at snf.stanford.edu Thu Mar 15 09:06:13 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Mar 2012 09:06:13 -0700 Subject: Comment pquest SNF 2012-03-12 14:34:49: Update BCl3 Message-ID: archived From eenriquez at snf.stanford.edu Thu Mar 15 09:06:18 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Mar 2012 09:06:18 -0700 Subject: Comment pquest SNF 2012-03-07 13:29:27: BCl3 update Message-ID: archived From eenriquez at snf.stanford.edu Thu Mar 15 09:06:22 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Mar 2012 09:06:22 -0700 Subject: Comment pquest SNF 2012-02-28 14:02:51: Update Message-ID: archived From eenriquez at snf.stanford.edu Thu Mar 15 09:08:29 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Mar 2012 09:08:29 -0700 Subject: Comment pquest SNF 2012-03-15 09:08:29: BCl3 is now available Message-ID: Flowed BCl3 at various setpoints for several minutes. Flow was very stable. From eenriquez at snf.stanford.edu Mon Mar 19 11:44:11 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Mar 2012 11:44:11 -0700 Subject: Shutdown pquest SNF 2012-03-19 11:44:11: Chiller not cooling. Message-ID: Waiting for the rebuilt chiller. From eenriquez at snf.stanford.edu Tue Mar 20 09:01:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Mar 2012 09:01:03 -0700 Subject: Shutdown pquest SNF 2012-03-19 11:44:11: Chiller not cooling. Message-ID: User wants to run using cda to cool the electrode. From eenriquez at snf.stanford.edu Tue Mar 20 09:01:28 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Mar 2012 09:01:28 -0700 Subject: Problem pquest SNF 2012-03-20 09:01:27: Chiller is still down Message-ID: From mdickey at snf.stanford.edu Tue Mar 20 10:54:05 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 20 Mar 2012 10:54:05 -0700 Subject: Problem pquest SNF 2012-03-20 09:01:27: Chiller is still down Message-ID: Installed rebuilt chiller....testing it From alsune at snf.stanford.edu Tue Mar 20 21:43:14 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Tue, 20 Mar 2012 21:43:14 -0700 Subject: Problem pquest SNF 2012-03-20 21:43:13: Chiller light is blinking red Message-ID: chiller light is blinking red From eenriquez at snf.stanford.edu Wed Mar 21 07:36:09 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Mar 2012 07:36:09 -0700 Subject: Problem pquest SNF 2012-03-20 21:43:13: Chiller light is blinking red Message-ID: Blinking red light is the water resistivity indicator. The blinking was caused by the new chiller. It is now green. From eenriquez at snf.stanford.edu Wed Mar 21 07:36:23 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Mar 2012 07:36:23 -0700 Subject: Comment pquest SNF 2012-03-15 09:08:29: BCl3 is now available Message-ID: archived From mtang at snf.stanford.edu Thu Mar 22 06:32:37 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 22 Mar 2012 06:32:37 -0700 Subject: Problem pquest SNF 2012-03-22 06:32:37: No Cl2/Fluorine time OK Message-ID: Corrosives vault duct work replacement underway,. Due to be complete by noon Friday. BCl3 is still available. Freons are OK. Chamber clean Friday morning, so Cl2 time will start tomorrow. From mdickey at snf.stanford.edu Fri Mar 23 08:13:30 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 23 Mar 2012 08:13:30 -0700 Subject: Comment pquest SNF 2012-03-23 08:13:30: clean Message-ID: Performed wet clean and replaced clamp springs. Ran O2 clean. From eenriquez at snf.stanford.edu Fri Mar 23 14:38:55 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Mar 2012 14:38:55 -0700 Subject: Problem pquest SNF 2012-03-22 06:32:37: No Cl2/Fluorine time OK Message-ID: Cl2 is now available From bajcsy at snf.stanford.edu Tue Mar 27 11:11:19 2012 From: bajcsy at snf.stanford.edu (bajcsy at snf.stanford.edu) Date: Tue, 27 Mar 2012 11:11:19 -0700 Subject: Shutdown pquest SNF 2012-03-27 11:11:18: no RF power and no plasma Message-ID: Hi, I tried to run oxygen3, but the plasma was not lighting up and there was almost no RF power (~3W or so). Michal From eenriquez at snf.stanford.edu Tue Mar 27 12:57:26 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Mar 2012 12:57:26 -0700 Subject: Shutdown pquest SNF 2012-03-27 11:11:18: no RF power and no plasma Message-ID: A user will try to run his recipe. From eenriquez at snf.stanford.edu Tue Mar 27 12:59:11 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Mar 2012 12:59:11 -0700 Subject: Problem pquest SNF 2012-03-27 12:59:10: Unable to strike O2 plasma Message-ID: A user was not able to run an O2 plasma. I will check it out after another user is done processing. From faridz at snf.stanford.edu Tue Mar 27 13:14:23 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 27 Mar 2012 13:14:23 -0700 Subject: Comment pquest SNF 2012-03-27 13:14:22: Plasma strikes Okay! Message-ID: From cbaxter at snf.stanford.edu Tue Mar 27 17:49:50 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 27 Mar 2012 17:49:50 -0700 Subject: Problem pquest SNF 2012-03-27 12:59:10: Unable to strike O2 plasma Message-ID: Ran O2 plasma and was able tune \d w/out problem. From lagous at snf.stanford.edu Wed Mar 28 11:51:01 2012 From: lagous at snf.stanford.edu (lagous at snf.stanford.edu) Date: Wed, 28 Mar 2012 11:51:01 -0700 Subject: Problem pquest SNF 2012-03-28 11:51:00: Plasma will not strike for Oxygen 3 recipe Message-ID: In Oxygen 3 recipe, for microwave power 700 W the plasma will not start. Reduced the power to 600W and it started. Check the microwave power! From eenriquez at snf.stanford.edu Wed Mar 28 15:23:45 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Mar 2012 15:23:45 -0700 Subject: Comment pquest SNF 2012-03-28 15:23:45: Update plasma will not strike Message-ID: Unable to duplicate the problem. Tested with and without wafers. We will continue to monitor this problem. From maxms at snf.stanford.edu Thu Mar 29 12:29:57 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Thu, 29 Mar 2012 12:29:57 -0700 Subject: Comment pquest SNF 2012-03-29 12:29:57: can't find log book? Message-ID: From eenriquez at snf.stanford.edu Fri Mar 30 08:28:57 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Mar 2012 08:28:57 -0700 Subject: Problem pquest SNF 2012-03-28 11:51:00: Plasma will not strike for Oxygen 3 recipe Message-ID: Unable to duplicate the problem. From eenriquez at snf.stanford.edu Fri Mar 30 08:29:19 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Mar 2012 08:29:19 -0700 Subject: Comment pquest SNF 2012-03-28 15:23:45: Update plasma will not strike Message-ID: Unable to duplicate the problem