From wslee at snf.stanford.edu Tue May 1 09:06:04 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 1 May 2012 09:06:04 -0700 Subject: Comment pquest SNF 2012-05-01 09:06:04: Added microwave turn on step to oxygen3 recipe Message-ID: Ran original oxygen 3 recipe and the ECR power maxed out at 5W. I added a 10s microwave turn on step per Elmer's comment and the ECR power reached 692W (700W setpoint). From zzp at snf.stanford.edu Thu May 3 23:37:28 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Thu, 3 May 2012 23:37:28 -0700 Subject: Shutdown pquest SNF 2012-05-03 23:37:27: wafer disappeared inside the chamber Message-ID: sorry for the trouble From mdickey at snf.stanford.edu Fri May 4 08:57:12 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 4 May 2012 08:57:12 -0700 Subject: Shutdown pquest SNF 2012-05-03 23:37:27: wafer disappeared inside the chamber Message-ID: Recovered wafer and performed wet clean. Installed new pins and springs. Lubricated drive and checked loading/unloading From mdickey at snf.stanford.edu Fri May 18 09:44:42 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 18 May 2012 09:44:42 -0700 Subject: Comment pquest SNF 2012-05-18 09:44:42: wet clean Message-ID: Performed wet clean, replaced springs. Ran O3 cleaning loading a wafer with no problems. From eenriquez at snf.stanford.edu Tue May 29 07:06:59 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 May 2012 07:06:59 -0700 Subject: Comment pquest SNF 2012-03-23 08:13:30: clean Message-ID: Archived From justinwu at snf.stanford.edu Thu May 31 18:08:19 2012 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Thu, 31 May 2012 18:08:19 -0700 Subject: Comment pquest SNF 2012-05-31 18:08:19: Out of log sheets Message-ID: