Shutdown pquest SNF 2012-05-03 23:37:27: wafer disappeared inside the chamber
zzp at snf.stanford.edu
zzp at snf.stanford.edu
Thu May 3 23:37:28 PDT 2012
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Comment pquest SNF 2012-05-01 09:06:04: Added microwave turn on step to oxygen3 recipe
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Shutdown pquest SNF 2012-05-03 23:37:27: wafer disappeared inside the chamber
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sorry for the trouble
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Comment pquest SNF 2012-05-01 09:06:04: Added microwave turn on step to oxygen3 recipe
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Shutdown pquest SNF 2012-05-03 23:37:27: wafer disappeared inside the chamber
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