Shutdown pquest SNF 2012-05-03 23:37:27: wafer disappeared inside the chamber
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Fri May 4 08:57:12 PDT 2012
Recovered wafer and performed wet clean. Installed new pins and
springs. Lubricated drive and checked loading/unloading
More information about the pquest-pcs
mailing list