From pelton at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: pelton at snf.stanford.edu (pelton at snf.stanford.edu) Date: May 31, 2000 Subject: Problem pquest: Turbo pump problem? Message-ID: The turbo pump to the main chamber on the PlasmaQuest shut itself down during an etch. It was revived by power cycling the controller; however, the pump took a long time to run back up to full operating speed, and seems to be making noise now. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 1, 2000 Subject: Problem Clear pquest: turbo sound's normal and its @speed holding base pres Message-ID: From rpu at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: rpu at snf.stanford.edu (rpu at snf.stanford.edu) Date: Jun 16, 2000 Subject: Problem pquest: pquest Message-ID: When the procedure goes to wait for load lock atm sensor, the machine won't stop. From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 20, 2000 Subject: Problem Clear pquest: check for enable LED's to be ON. Message-ID: From rpu at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: rpu at snf.stanford.edu (rpu at snf.stanford.edu) Date: Jul 5, 2000 Subject: Problem pquest: pquest Message-ID: My wafer stuck inside the chamber. The wafer seems tilted and would not go out with the load arm. From rpu at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: rpu at snf.stanford.edu (rpu at snf.stanford.edu) Date: Jul 10, 2000 Subject: Shutdown pquest: Message-ID: test From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 10, 2000 Subject: Shutdown Clear pquest: Message-ID: test From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 10, 2000 Subject: Problem Clear pquest: Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 10, 2000 Subject: Shutdown pquest: Grease on clamp - must be cleaned Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 12, 2000 Subject: Shutdown Clear pquest: cleaned grease from clamp Message-ID: From rpu at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: rpu at snf.stanford.edu (rpu at snf.stanford.edu) Date: Jul 13, 2000 Subject: Shutdown pquest: Message-ID: 1. Plasma didnot switch on for about 45 sec after microwave on. 2. Bias voltage dropped to 15 from 42. 3. Tourbopump sounded like it was revving down. 4. Plasma discharge turned weak. 5. Chamber pressure on screen is high. 6. Run aborted. 7. GaAs sample still in chamber. Please check system. Thanks!! From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 14, 2000 Subject: Shutdown Clear pquest: removed wafer & restarted turbo pump. Message-ID: From gkeeler at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: gkeeler at snf.stanford.edu (gkeeler at snf.stanford.edu) Date: Aug 25, 2000 Subject: Shutdown pquest: wafer stuck in machine Message-ID: Looks like someone used grease... will contact previous users. -Gordon From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 28, 2000 Subject: Shutdown Clear pquest: removed stuck wafer & cleaned clamp w/Acetone Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 28, 2000 Subject: Problem pquest: Need a new public wafer carrier. Message-ID: From pelton at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: pelton at snf.stanford.edu (pelton at snf.stanford.edu) Date: Aug 31, 2000 Subject: Problem pquest: Trouble loading wafers: Often skips loading step Message-ID: From pelton at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: pelton at snf.stanford.edu (pelton at snf.stanford.edu) Date: Sep 9, 2000 Subject: Shutdown pquest: Wafer fallen off pins: stuck in chamber Message-ID: From mcvittie at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sep 12, 2000 Subject: Shutdown Clear pquest: Removed smashed wafer. Jim Message-ID: From gkeeler at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: gkeeler at snf.stanford.edu (gkeeler at snf.stanford.edu) Date: Sep 15, 2000 Subject: Problem pquest: BCl3 gas flow too low on Plasma Quest Message-ID: Tried running an etch with BCl3 set at 15 sccm, only 1.5 sccm comes out during run. Did a CLEAN-2 run, tried resetting the machine, same problem. -Gordon 5-2291 From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 18, 2000 Subject: Problem Clear pquest: Purge panel ESO vavle was clodsed. Message-ID: From qyuan at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: qyuan at snf.stanford.edu (qyuan at snf.stanford.edu) Date: Sep 22, 2000 Subject: Problem pquest: Message-ID: Reflected power suddenly increeased. Machine can not unload the wafer. From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 25, 2000 Subject: Problem Clear pquest: restarted turbo pump& unloaded wafer Message-ID: From pelton at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: pelton at snf.stanford.edu (pelton at snf.stanford.edu) Date: Oct 10, 2000 Subject: Shutdown pquest: Turbopump not working Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 11, 2000 Subject: Shutdown Clear pquest: restarted turbo again. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 11, 2000 Subject: Problem Clear pquest: perhaps backside films fooled the wafer sensor? Message-ID: From bajcsy at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: bajcsy at snf.stanford.edu (bajcsy at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-06 12:42:41: bias voltage, He flow, and temperature problems Message-ID: <31860110.17.1344282161107.JavaMail.coral@shine> Ran oxygen3 for 25min (everything looked OK), and then Faragaas (a seasoning run w/ empty wafer for 25 min, and then 3 runs each about 5-6min) The bias voltage was ~40V during seasoning run (25min run), dropped to 10V for the first run, and was 18V in all other attempts. He flow was normal (~10) during seasoning, but jumped around in the first run ( from 6 to 19), and then stabilized at 18 during subsequent runs. Most importantly, the temperature (set to 13 C) started dropping during first run and then stabilized at 10C in 2nd and 3rd run. Is the temperature stabilization broken? From jimkruger at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-08-06 16:35:57: PQ OK Message-ID: <31319063.32.1344296157869.JavaMail.coral@shine> Temp control seems OK. S0me voltage "nois" on "Oxygen 3" wqrm up, but OK for 4 "real" Wafers 4. Maybe I just got lucky. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-02 12:56:07: DC Bias and backside Message-ID: <24285416.43.1344351080970.JavaMail.coral@shine> Removed cover shield and vacuum wafer chips.. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-03 16:37:45: PQuest bias voltage "jumping"; RF effect on He Message-ID: <1862311.44.1344351135509.JavaMail.coral@shine> Removed shield and vacuum wafer chips.. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-06 12:42:41: bias voltage, He flow, and temperature problems Message-ID: <26587087.45.1344351173898.JavaMail.coral@shine> From jimkruger at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-09 08:49:09: backside He flow high Message-ID: <1117741.86.1344527349125.JavaMail.coral@shine> Backside He flow is high. Please check O-ring and clamp springs as part of tomorrow's wet clean. If you think your recipe is tepmerature sensitive and you use high chuckRF, run a test first. I was getting He flow ~ 8.2, where 8.5 = "no wafer", e.g. zero Torr at the back of the wafer. Remember, because of RF interference, read the He flow before RF comes on, ignore the value with RF on. From jimkruger at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-08-09 13:52:47: He backside flow better, varies Message-ID: <11239182.98.1344545568404.JavaMail.coral@shine> different carriers give different flow, 4.3 (good) to 7.3, not as good. 8.5 = no He cooling. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-09 08:49:09: backside He flow high Message-ID: <1236810.121.1344610225888.JavaMail.coral@shine> We changed both the springs and o-ring. Ran O2 clean w/out wafer on chuck. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-08-17 16:25:04: no process cooling water Message-ID: <26144737.167.1345245905021.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-08-17 16:25:04: no process cooling water Message-ID: <12430938.192.1345250837795.JavaMail.coral@shine> System back normal operation.. From jimkruger at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-22 15:43:38: BackSide He very high = 8.4 Message-ID: <63885.61.1345675419263.JavaMail.coral@shine> BackSide He very high = 8.4. This is the flow for "no wafer", so cooling is very marginal. Delay your etch until after the Friday wet clean if you are temperature sensative. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-22 15:43:38: BackSide He very high = 8.4 Message-ID: <3023882.112.1345821806229.JavaMail.coral@shine> Mike and I wet cleaned the chamber and also changed the springs and lip seal oring. From jimkruger at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-24 10:58:57: Backside He still bad Message-ID: <2911091.135.1345831137863.JavaMail.coral@shine> Backside He has improved only slightly to 8.2 sccm at 20 C, 10 Torr He. "Non Wafer" = 8.4 sccm = zeor He backside pressure. "Oxygen 3" voltage is low : - 40 v. Expect 60 or even 80 v. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-08-27 14:45:58: Update backside helium Message-ID: <30163842.26.1346103959359.JavaMail.coral@shine> Centered the clamp and adjusted the down force but still has high helium leak rate. Will try again tomorrow. From faridz at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-08-30 10:23:45: wafer unload problem. Message-ID: <30377517.116.1346347426511.JavaMail.coral@shine> wafer broken inside the chamber, From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-08-30 10:23:45: wafer unload problem. Message-ID: <27609041.136.1346361212744.JavaMail.coral@shine> Cleaned the chamber. The wafer was stuck to the o-ring. Replaced the wafer seal o-ring, baked it and ran O3 plasma. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-08-31 09:14:39: Clamp problem Message-ID: <20885102.6.1346429680325.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-08-31 09:14:39: Clamp problem Message-ID: <7865621.11.1346435931870.JavaMail.coral@shine> completed wafer clamp work From kgc at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: kgc at snf.stanford.edu (kgc at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-31 11:36:47: Backside He is 18.8sccm Message-ID: <26201550.17.1346438208122.JavaMail.coral@shine> for Oxygen3 From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-08-31 13:14:57: Backside He flow Message-ID: <16402180.26.1346444098598.JavaMail.coral@shine> The maximum actual helium flow @ 20 C can only be around 8.5 sccm. Any readings > 8.5 sccm is caused by rf noise. From bucklesm at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-09-03 15:51:04: wafer stuck in chamber Message-ID: <31531226.3.1346712665033.JavaMail.coral@shine> The wafer fell off the pins while loading. Pressed esc, load arm is halfway out (so chamber door is open). The wafer is not broken. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-09-03 15:51:04: wafer stuck in chamber Message-ID: <26186511.8.1346778398034.JavaMail.coral@shine> Recovered the user's wafer. Cycled wafers to test handling. Ran O2 plasma. From jimkruger at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-09-04 12:49:46: broken wafer piece left inside Message-ID: <4733915.20.1346788187577.JavaMail.coral@shine> got good He = 4, on first wafer, not after (piece on chuck?) Volatege very low, got 12 v for Oxygen3, tuniibg goes off scale. RF = 9 w tuning OK, V = 9 instead of 17 as before. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-09-04 12:49:46: broken wafer piece left inside Message-ID: <2606803.45.1346883816500.JavaMail.coral@shine> Lowered the pin mid position. Cycled wafers many times From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-24 10:58:57: Backside He still bad Message-ID: <31518612.12.1347654040641.JavaMail.coral@shine> Eliminated raised areas on the wafer o-ring. Helium flow before the plasma strike is around 5.3 sccm. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-31 11:36:47: Backside He is 18.8sccm Message-ID: <18667724.13.1347654065651.JavaMail.coral@shine> Eliminated raised areas on the wafer o-ring. Helium flow before the plasma strike is around 5.3 sccm. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-08-31 11:36:47: Backside He is 18.8sccm Message-ID: <11389672.14.1347654109661.JavaMail.coral@shine> This is RF noise. Please read the backside He flow before the plasma strikes. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-08-27 14:45:58: Update backside helium Message-ID: <13646336.15.1347654124680.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-08-09 13:52:47: He backside flow better, varies Message-ID: <25163609.16.1347654132689.JavaMail.coral@shine> Eliminated raised areas on the wafer o-ring. Helium flow before the plasma strike is around 5.3 sccm. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-08-06 16:35:57: PQ OK Message-ID: <22465939.17.1347654151708.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-06-15 10:04:25: wet clean Message-ID: <26811937.18.1347654163716.JavaMail.coral@shine> Archived From mdickey at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-09-21 10:49:20: wet clean Message-ID: <20085762.13.1348249760768.JavaMail.coral@shine> completed wet clean From zzp at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-09-21 23:09:18: wafer lost in the chamber Message-ID: <4975016.24.1348294158644.JavaMail.coral@shine> probably broken From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-09-21 23:09:18: wafer lost in the chamber Message-ID: <2511137.2.1348435145857.JavaMail.coral@shine> Recovered sample wafer inside the chamber, wiped down chamber with ipa and ran O2 plasma. From gyama at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-09-25 11:07:20: one of the port covers is missing Message-ID: <18068557.11.1348596440484.JavaMail.coral@shine> From derickson at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-09-25 15:30:22: Wafer stuck in chamber Message-ID: <1270783.18.1348612222991.JavaMail.coral@shine> Saw wafer fall off pins, stoped the process before wafer broke. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-09-25 15:30:22: Wafer stuck in chamber Message-ID: <13984540.24.1348619470691.JavaMail.coral@shine> Recovered wafer from the chamber, wiped down chamber with ipa and ran O2 plasma clean.. From kgc at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: kgc at snf.stanford.edu (kgc at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-09-26 12:15:14: Clamp making noise, seems "tilted" Message-ID: <10873977.43.1348686915520.JavaMail.coral@shine> The clamp makes a shuddering noise when coming down, wafer doesn't seem like it's quite parallel to the chuck and moves as the chuck comes down. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-09-26 12:15:14: Clamp making noise, seems "tilted" Message-ID: <26514452.59.1348758021584.JavaMail.coral@shine> Lubricated the robot arm worm drive shaft. From robertchen at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: robertchen at snf.stanford.edu (robertchen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-09-27 23:02:03: Process Pump Ready Shows Alarm Message-ID: <10184040.84.1348812124371.JavaMail.coral@shine> Came to edit a recipe, noticed that the process pump ready is showing an alarm. Pumps appear to be fine, but maybe someone can check this out. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-09-27 23:02:03: Process Pump Ready Shows Alarm Message-ID: <16977565.87.1348842363825.JavaMail.coral@shine> This is a known issue. This alarm is triggered by a sensor from an old pump cofiguration. There is actually no problem with the system. From marina01 at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: marina01 at snf.stanford.edu (marina01 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-10-01 20:22:15: Wafer fell off while loading Message-ID: <30950385.23.1349148136275.JavaMail.coral@shine> Wafer fell off while loading and is stuck inside with the load arm halfway in. Pressed escape. From mdickey at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-10-01 20:22:15: Wafer fell off while loading Message-ID: <19161420.0.1349189240223.JavaMail.coral@shine> Retrieved users wafer and loaded/unloaded a wafer with no problems. Recovered wafer is at the tool From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-10-03 09:08:30: Vacuum pump problem Message-ID: <23455070.6.1349280511731.JavaMail.coral@shine> Vacuum pump keeps shutting off. Replacing turbo backing pump. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-10-03 09:08:30: Vacuum pump problem Message-ID: <21054214.21.1349306685039.JavaMail.coral@shine> Replaced the turbo backing pump. Cycled several wafers with no problems. From bucklesm at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: bucklesm at snf.stanford.edu (bucklesm at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-10-03 17:59:00: wafer fell off pins while loading, still in pquest Message-ID: <25719065.22.1349312340612.JavaMail.coral@shine> From mdickey at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-10-03 17:59:00: wafer fell off pins while loading, still in pquest Message-ID: <3499289.38.1349381542845.JavaMail.coral@shine> Retrieved users wafer. Lubed drive tray and loaded and unloaded many times without duplicating the error. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-10-09 15:01:33: Ch4 is not available. Message-ID: <15699591.30.1349820094282.JavaMail.coral@shine> From derickson at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-10-15 14:35:26: Clamping noise Message-ID: <1415268.22.1350336926622.JavaMail.coral@shine> Noticed clamping noise is louder then usually. More noticed during the final clamp of wafer at the bottom of stroke. From jimkruger at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-10-18 13:16:01: Clamp-down sensor needs adjustment Message-ID: <24225764.31.1350591362190.JavaMail.coral@shine> often needs a little help to "make" the opto sensor. Vibration from the stepper motor while failing to "make" is shifting the wafer on the arm on unload. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-10-18 13:16:01: Clamp-down sensor needs adjustment Message-ID: <5190593.5.1350834622335.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-10-09 15:01:33: Ch4 is not available. Message-ID: <1419833.121.1351280808834.JavaMail.coral@shine> CH4 is now available. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-04-16 09:02:35: Update ECR power problem Message-ID: <22799031.122.1351280858843.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-04-27 11:11:34: Update microwave generator Message-ID: <7608407.123.1351280871851.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-05-01 09:06:04: Added microwave turn on step to oxygen3 recipe Message-ID: <22924207.124.1351280886859.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-07-26 20:15:35: Fluorine time extended to Monday Message-ID: <17331808.125.1351280897866.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-07-30 08:05:01: wet clean Message-ID: <28398293.126.1351280903874.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-07-31 14:47:21: pen holder is a through hole now... Message-ID: <20201300.127.1351280909882.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-07-23 10:07:22: Software Issue Message-ID: <18751836.128.1351280927889.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-03-27 13:14:22: Plasma strikes Okay! Message-ID: <26248830.129.1351280934895.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2011-11-17 11:00:48: J Kruger's comments on unstable plasma Message-ID: <11822002.130.1351280939902.JavaMail.coral@shine> Archived From kgc at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: kgc at snf.stanford.edu (kgc at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-10-29 16:25:24: RF Power not working Message-ID: <17849097.30.1351553125132.JavaMail.coral@shine> Rf Power doesnt rise to the power set in recipe (appears to max out at "35") From vijayn at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: vijayn at snf.stanford.edu (vijayn at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-10-29 17:06:55: RF Power Not Working? Message-ID: <21525965.31.1351555615435.JavaMail.coral@shine> I hope this changes the machine to Yellow! From mtang at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-10-30 06:00:24: RF Power is low Message-ID: <27986274.38.1351602025101.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-10-29 16:25:24: RF Power not working Message-ID: <29208947.65.1351627368737.JavaMail.coral@shine> RF matching network tuning mechanism hit mechanical stops. Moved the tuning off the limit and ran the user's recipe with no problems. Also ran Oxygen3 recipe. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-10-29 17:06:55: RF Power Not Working? Message-ID: <1247677.66.1351627375755.JavaMail.coral@shine> RF matching network tuning mechanism hit mechanical stops. Moved the tuning off the limit and ran the user's recipe with no problems. Also ran Oxygen3 recipe. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-10-30 06:00:24: RF Power is low Message-ID: <19217535.67.1351627404764.JavaMail.coral@shine> RF matching network tuning mechanism hit mechanical stops. Moved the tuning off the limit and ran the user's recipe with no problems. Also ran Oxygen3 recipe. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-10-15 14:35:26: Clamping noise Message-ID: <20917228.77.1351638398192.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-10-31 10:52:08: load arm problem Message-ID: <28307835.111.1351705928831.JavaMail.coral@shine> Load arm stops in the middle of wafer transfer. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-10-31 10:52:08: load arm problem Message-ID: <32036151.118.1351713805583.JavaMail.coral@shine> Cleaned and lubricated the lead screw. Cycled the loading 10x with no problems. From luckys at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: luckys at snf.stanford.edu (luckys at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-11-08 21:19:18: Wafer broken inside Message-ID: <16081535.57.1352438359221.JavaMail.coral@shine> I made sure I loaded it right with the flat and everything, but the wafer broke and I am not sure how that happenned. So sorry for the inconvenience :( From mdickey at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-11-08 21:19:18: Wafer broken inside Message-ID: <570890.2.1352479486145.JavaMail.coral@shine> Cleaned up broken wafer pieces. Look like more than one wafer was run. Left big pieces at the tool for the user to recover. Ran O3 clean with no problems From mtang at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-11-10 08:07:41: Fluorine week extended to 11/19 Message-ID: <16010704.40.1352563662445.JavaMail.coral@shine> By popular request, fluorine time for the week of 11/12 is extended through the weekend to Monday, 11/19. From mdickey at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-11-13 08:45:34: CF4 Message-ID: <12073952.0.1352825135526.JavaMail.coral@shine> Out of CF4. Replacement has been ordered From mdickey at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-11-13 10:01:32: CF4 Message-ID: <3764174.8.1352829692593.JavaMail.coral@shine> CF4 expected to be delivered thursday at the latest From jimkruger at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-11-13 17:52:46: Al etch issues Message-ID: <22593188.33.1352857966544.JavaMail.coral@shine> Al etch, "_jjkAl2" after conditioning, 1st 2 Si test wafers etched OK, then on Sapphire wafer etch was incomplete. Next Si test also incomplete. Leak-up rate ~ 1.5 mTorr/ min, not too far off the 1 mTorr/min expected. Issue unknown From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-11-13 10:01:32: CF4 Message-ID: <12940440.97.1353036001106.JavaMail.coral@shine> CF4 is back online. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-11-13 08:45:34: CF4 Message-ID: <608423.98.1353036005113.JavaMail.coral@shine> From ouyang at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: ouyang at snf.stanford.edu (ouyang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-11-15 19:51:52: broken wafer Message-ID: <21860387.99.1353037912873.JavaMail.coral@shine> the dummy wafer is broken inside the chamber. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-11-15 19:51:52: broken wafer Message-ID: <30443840.100.1353040357550.JavaMail.coral@shine> Vented chamber and vacuumed broken wafer chips, wiped down chuck with water and ipa. Ran O2 clean plasma. From maxms at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-11-18 23:51:36: wafer stuck inside Message-ID: <12010195.4.1353311497624.JavaMail.coral@shine> my wafer is stuck inside. the process finished, the arm went in to retrieve the wafer. the wafer was loaded onto the arm, but the arm will not retract! the wafer is not broken. A wafer holder in on top of the machine for the retrieved wafer to be placed. please try your best not to break this wafer. thanks, max From mdickey at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-11-18 23:51:36: wafer stuck inside Message-ID: <30949756.0.1353348384997.JavaMail.coral@shine> Performed wet clean and loaded/unloaded wafer a few times with no problems. Elmer adjusted position sensor. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-11-13 17:52:46: Al etch issues Message-ID: <1003117.4.1353458837941.JavaMail.coral@shine> No issue on incompleted etch. From faridz at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-12-03 14:15:13: incomplete strip Message-ID: <18788174.18.1354572913486.JavaMail.coral@shine> I process 15 wafers through all wafers had in complete strip and two wafers no strip at all. It ight be a leak in the system or plasma not striking please check. From vilanova at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-12-03 14:15:13: incomplete strip Message-ID: <5791379.20.1354573093210.JavaMail.coral@shine> Wrong Tool... Sorry From marina01 at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: marina01 at snf.stanford.edu (marina01 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-12-07 15:29:15: unexpected errors Message-ID: <7484998.17.1354922955782.JavaMail.coral@shine> 1. pen can't press start 2. tried using tab to start the recepy, but pressed System Reset instead 3. every other time I press Edit Recepy (to test pen) it alerts it can't open editor 4. finally managed to press Start (I think it corresponds to the option of opening Edit Recepy) but it alerted something (RF?) is not set for manual control 5. cannot open the lid wafer stuck inside, not loaded (feel free to dispose) From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-12-07 15:29:15: unexpected errors Message-ID: <3951667.18.1354926808202.JavaMail.coral@shine> Reset the system and recovered wafer on the load lock. The touch screen is dim, when using the tool need to drag the pionter to the icon. From wslee at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-12-10 22:21:20: chuck does not cool down Message-ID: <22474382.35.1355206880779.JavaMail.coral@shine> I set the watlow to 10C and the water chiller to 5C. The chuck temperature stays at 35C even without any etch taking place. I looked at the inlet and outlet to the water chiller and noticed that no water seems to be flowing into the chiller - there are some air bubbles. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Problem pquest SNF 2012-12-10 22:21:20: chuck does not cool down Message-ID: <30074543.48.1355245146838.JavaMail.coral@shine> The three way valve that is used to switch between coolant and n2 purge was set in the closed position. also found the refrigeration switch on the chiller was set to minimum. Set both to the correct position, lowered the chiller temp to 10 c and heater to 5 c. The electrode temp is stable at 12 C. From mtang at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-12-11 12:38:35: Light pen doesn't activate Message-ID: <16555307.3.1355258316211.JavaMail.coral@shine> From wslee at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-12-11 16:15:02: ETA on light pen? Message-ID: <13653774.7.1355271303057.JavaMail.coral@shine> Any estimate on the light pen? From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-12-11 12:38:35: Light pen doesn't activate Message-ID: <7243012.3.1355279612924.JavaMail.coral@shine> The P5000 light pen is compatible, took the light pen from the P5000 remote terminal from the basement. The new (used) light work better than the orignal light pen. When using the new light pen you have to point and click on the icon using the little push botton on the light pen. From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-12-11 16:15:02: ETA on light pen? Message-ID: <23836633.4.1355279662414.JavaMail.coral@shine> Done From cbaxter at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Comment pquest SNF 2012-12-11 18:41:48: New light pen Message-ID: <25935000.5.1355280109729.JavaMail.coral@shine> When using the new light pen, just point and click on the icon using the small push botton on the light pen. From zzp at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-12-12 16:19:38: wafer broken at loading Message-ID: <20100732.6.1355357979468.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-12-12 16:19:38: wafer broken at loading Message-ID: <9291303.9.1355369984561.JavaMail.coral@shine> Cleaned the chamber, cycled wafers and ran an O2 clean. From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-12-17 09:44:25: wafer clamp not working Message-ID: <10657389.24.1355766266082.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:09:19 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:09:19 -0000 Subject: Shutdown pquest SNF 2012-12-17 09:44:25: wafer clamp not working Message-ID: <4592269.44.1355786351759.JavaMail.coral@shine> Clamp drive was jammed. Loosed up the drive and re-lubricated.